Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (2 from 40,635 patents)
2 patents:
1. 11237478 - Cleaning module, cleaning apparatus and method of cleaning photomask
2. 10747105 - Cleaning module, cleaning apparatus and method of cleaning photomask