Taiwan Semiconductor Manufacturing Comp. Ltd.

Industrial Technology Research Institute

Yi-Hsin Yu

Hong-Yi Wu

Chih-Jung Weng

Chung-Cheng Ni

A detachable physiological monitoring device includes a detachable electrode and an electrical coupling unit electrically connected to the detachable electrode. The electrical coupling unit includes a flexible substrate, a fabric, and a conductive wire. The flexible substrate has a first surface and a second surface opposite to the first surface, and the flexible substrate has a first opening. The fabric is disposed at the first surface of the flexible substrate. The fabric includes a second opening corresponding to the first opening and a conductive region surrounding the second opening. The conductive wire has a first terminal and a second terminal opposite to the first terminal, and the first terminal is connected to the conductive region. The detachable electrode contacts the conductive region, and is connected to the conductive wire.

Detachable physiological monitoring device

A dummy dispense of liquid is controlled by recording a time at which a substrate is processed; recording a time at which a liquid is dispensed; comparing the time at which the substrate is processed and the time at which the liquid is dispensed to generate a dummy dispense signal when a dummy dispense is required. A system for controlling dummy dispense of liquid includes at least one information storage device storing a time at which a substrate is processed and a time at which a liquid is dispensed. At least one processor compares the time at which the substrate is processed and the time at which the liquid is dispensed to determine whether a dummy dispense is required.

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Hsinchu, Taiwan

Yi-Hsin Yu