Suzhou Oriental Semiconductor Co., Ltd.

Suzhou Oriental Semiconductur Co., Ltd.

Yi Gong

Wei Liu

Lei Liu

Yuanlin Yuan

Rui Wang

Zhendong Mao

Pengfei Wang

Xin Wang

Zhenyi Xu

Xi Lin

Peng-Fei Wang

Provided is a semiconductor power device. The device includes: at least one p-type body region located on the top of an n-type drift region, a first n-type source region and a second n-type source region located within the p-type body region, a first gate structure configured to control a first current channel between the first n-type source region and the n-type drift region to be turned on or off; and a second gate structure configured to control a second current channel between the second n-type source region and the n-type drift region to be turned on or off. The second gate structure is recessed in the n-type drift region.

Semiconductor power device

The present application belongs to the technical field of semiconductor power devices and provides a semiconductor power device. The semiconductor power device includes an n-shaped substrate, an n-shaped epitaxial layer positioned on the n-shaped substrate, and at least three grooves recessed inside the n-shaped epitaxial layer, where a portion of the n-shaped epitaxial layer between two adjacent grooves of the at least three grooves is a mesa structure, an upper part of the mesa structure is provided with a p-shaped body region, and an n-shaped source region is provided inside the p-shaped body region. The mesa structure includes at least one mesa structure with a lower width being a first width and at least one mesa structure with a lower width being a second width, and the second width is greater than the first width.

A gate trench and a source trench are formed simultaneously in the same etching process, a p-type semiconductor layer and a p-type doped region can be contacted in a self-aligned manner in the source trench, and the process is simple. A first insulating layer and a first gate are formed in a lower part of the gate trench, and a second insulating layer and a second gate are formed in an upper part of the gate trench so that the thick first insulating layer can protect the second gate from being easily broken down, the first gate can increase an electric field near a bottom of the gate trench, and thus a voltage withstand level of the semiconductor device can be improved. A bottom of the source trench can penetrate deep into a second n-type semiconductor layer.

Manufacturing method of a semiconductor device

Provided is a semiconductor super junction power device which includes a super junction MOSFET cell array composed of multiple super junction MOSFET cells. A gate structure of the super junction MOSFET cell includes a gate dielectric layer, a gate and an n-type floating gate. The gate and the n-type floating gate are located above the gate dielectric layer; the gate is located on a side close to the n-type source region, and the n-type floating gate is located on a side close to the n-type drift region; the gate acts on the n-type floating gate through capacitive coupling. The n-type floating gate of at least one MOSFET cell is isolated from the p-type body region through the gate dielectric layer, and the n-type floating gate of at least one MOSFET cell contacts the p-type body region through an opening in the gate dielectric layer to form a p-n junction diode.

Semiconductor super-junction power device

Provided is an insulated gate bipolar transistor (IGBT) device. The IGBT device includes p-type body regions located on a top of an n-type drift region, a first n-type emitter region located within the p-type body region; a first gate structure located over the p-type body region, where the first gate structure includes a first gate dielectric layer, a first gate and an n-type floating gate which are located above the first gate dielectric layer, where the n-type floating gate is located on a side close to the n-type drift region in a lateral direction; an insulating dielectric layer located between the n-type floating gate and the first gate; and one opening in the first gate dielectric layer. The n-type floating gate is in contact with the p-type body region to form a p-n junction diode through the one opening.

IGBT device

Provided is a semiconductor super junction power device. The semiconductor super junction power device includes an MOSFET cell array composed of multiple super junction MOSFET cells. Each of multiple MOSFET cells includes a p-type body region located at the top of an n-type drift region, a p-type columnar doping region located below the p-type body region, an n-type source region located in the p-type body region, a gate dielectric layer located above the p-type body region, a gate electrode located above the p-type body region, an n-type floating gate located above the p-type body region and an opening located in the gate dielectric layer, where in a lateral direction, the gate electrode is located on one side close to the n-type source region; an opening located in the gate dielectric layer, where the n-type floating gate contacts the p-type body region through the opening to form a p-n junction diode.

Provided is an insulated gate bipolar transistor power device. The IGBT power device includes a gate dielectric layer located above the two p-type body regions and the n-type drift region between the two p-type body regions, an n-type floating gate located above the gate dielectric layer; a gate located above the gate dielectric layer and the n-type floating gate; an insulating dielectric layer between the gate and the n-type floating gate; a first opening located in the gate dielectric layer, where the n-type floating gate is in contact with one of the two p-type body regions through the first opening to form a p-n junction diode; and a second opening located in the gate dielectric layer, where the n-type floating gate is in contact with the other of the two p-type body regions through the second opening to form the p-n junction diode.

IGBT power device

Provided is an IGBT device. The IGBT device includes an MOSFET cell array, where each MOSFET cell includes a p-type body region located at the top of an n-type drift region, an n-type emitter region located in the p-type body region, and a gate dielectric layer, a gate electrode and an n-type floating gate which are located above the p-type body region. The gate electrode is located above the gate dielectric layer, the n-type floating gate is located above the gate dielectric layer, and the gate electrode acts on the n-type floating gate through capacitive coupling. The n-type floating gate of at least one MOSFET cell is isolated from the p-type body region through the gate dielectric layer, and the n-type floating gate of at least one MOSFET cell contacts the p-type body region through an opening in the gate dielectric layer to form a p-n junction diode.

Disclosed is a method for manufacturing a semiconductor super-junction device. The method includes: a gate is firstly formed in a gate region of a first trench, then an n-type epitaxial layer is etched with a hard mask layer and an insulating side wall covering a side wall of the gate as masks, and a second trench is formed in the n-type epitaxial layer, and then a p-type column is formed in the first trench and the second trench.

Method for manufacturing a semiconductor super-junction device

Disclosed is a method for manufacturing a semiconductor super-junction device. The method includes: a p-type column is formed through an epitaxial process, and then a gate is formed in a self-alignment manner.

Disclosed is a power MOSFET device, the power MOSFET device includes a source, a drain, a first gate, a second gate, a body diode, and a body region contact diode. The source, the drain, and the first gate constitute a first MOSFET structure. The source, the drain, and the second gate constitute a second MOSFET structure. A cathode of the body diode is connected to the drain, and an anode of the body region contact diode is connected to an anode of the body diode, a cathode of the body region contact diode is connected to the source. The first gate is configured to control turning on and off of the first MOSFET structure by means of a gate voltage. The second gate is connected to the source and configured to control turning on and off of the second MOSFET structure by means of a source voltage.

Power MOSFET device

Provided is a trench-type power transistor. The trench-type power transistor includes a source, a drain, a first gate, a second gate, a body diode and a body region contact diode. The body diode and the body region contact diode are connected in series. The first gate controls turn-on and turn-off of a first current channel through a gate voltage, the second gate is connected to the source and controls turn-on and turn-off of a second current channel through a source voltage.

Trench power transistor

Disclosed is a semiconductor power device, including a semiconductor substrate; a MOSFET region formed on the semiconductor substrate, where the MOSFET region includes at least one MOSFET unit; and at least one collector region located in the semiconductor substrate, where the collector region and the MOSFET unit form an insulated gate bipolar transistor.

Disclosed is an insulated gate bipolar transistor (IGBT) power device, including a bipolar transistor, a first MOS transistor, a second MOS transistor, a body diode and a body region contact diode. An anode of the body region contact diode and an anode of the body diode are connected to the bipolar transistor. A first gate of the first MOS transistor is externally connected to a gate voltage of the IGBT power device and configured to control turning on and off of the first MOS transistor by means of the gate voltage of the IGBT power device. A second gate of the second MOS transistor is connected to an emitter voltage of the IGBT power device and configured to control turning on and off of the second MOS transistor by means of the emitter voltage of the IGBT power device.

The present disclosure relates to the technical field of semiconductor power devices, and in particular relates to a semiconductor super-junction power device and a manufacturing method therefor. The super-junction power device of the present disclosure includes a termination region and a cell region; the cell region includes a substrate epitaxial layer and a drain region at a bottom of the substrate epitaxial layer, the substrate epitaxial layer has a plurality of pillar epitaxial doped regions and a plurality of JFET regions, a body region is arranged at a top of each of the plurality of pillar epitaxial doped regions; the body regions have at least two unequal widths; two source regions are arranged in each of the body regions; a gate oxide layer is arranged on the body regions and the JFET regions; and a gate is arranged on the gate oxide layer.

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Jiangsu, China

Yi Gong