United Microelectronics Corp.

Yi Chuen Eng

I-Chang Wang

Wei-Chih Chen

Teng-Chuan Hu

Hsiu-Kuan Hsu

A fin-shaped field effect transistor includes a substrate and a gate. The substrate includes an active area, where the active area includes a fin structure having at least an extension part protruding from the fin structure. The gate is disposed over the fin structure and directly on the extension part. The present invention also provides a planar field effect transistor including a substrate and a gate. The substrate includes an active area, where the active area includes a frame area and a penetrating area penetrating through the frame area. The gate is disposed over the active area, where the gate is directly disposed on the penetrating area, and the frame area at least at a side of the gate constitutes a source/drain surrounding an isolation island.

Planar field effect transistor

Semiconductor process

Semiconductor process, planar field effect transistor and fin-shaped field effect transistor

A field effect transistor includes a substrate, an isolation layer, a gate, a channel, drain and a source. The substrate has an active region having a rectangular area and at least one protrusion protruded from the rectangular area. The isolation layer is formed on the substrate and encircling the active region. The gate crosses the active region and is formed above a middle portion of the active region. The channel is formed in the active region directly under the gate, extends to the at least one protrusion, and divides the active region into a first section and a second section. The drain formed in the first section and the source formed in the second section.

Field effect transistor and method for fabricating field effect transistor

Growing community of inventors

Tainan, Taiwan

Yi Chuen Eng