Tower Semiconductor Ltd.

Tel Aviv University

Yhonatan Vaknin

Yakov Roizin

Alexey Heiman

Yossi Rosenwaks

Menachem Vofsy

Klimentiy Shimanovich

Zohar Shaked

For example, an Electrostatically Formed Nanowire (EFN) may include a source region; at least one drain region; a wire region configured to drive a current between the source and drain regions via a conductive channel; a first lateral-gate area extending along a first surface of the wire region between the source and drain regions; a second lateral-gate area extending along a second surface of the wire region between the source and drain regions; and a sensing area in opening in a backside of a silicon substrate under the wire region and the first and second lateral-gate areas, the sensing area configured to, in reaction to a predefined substance, cause a change in a conductivity of the conductive channel.

Apparatus, system and method of an electrostatically formed nanowire (EFN)

Some demonstrative embodiments include an apparatus of a temperature sensor to sense temperature, the apparatus including a first pad on a silicon substrate; a second pad on the silicon substrate; a silicon nanowire having a first end coupled to the first pad and a second end coupled to the second pad, the silicon nanowire configured to drive a current between the first pad and the second pad, the current depending at least on the temperature; and a charged dielectric layer covering at least three sides of the silicon nanowire.

Apparatus, system and method of a temperature sensor

Growing community of inventors

Yoqneam Illit, Israel

Yhonatan Vaknin