Wd Media, LLC

Yew Ming Chiong

Tatsuru Tanaka

Jinliang Chen

Paul Christopher Dorsey

Allen J Bourez

Robert D Hempstead

Chang Bok Yi

Noe D Taburaza

Chin Yim Poon

Hongling Liu

Phi Cam Ha

A cryogenic dynamic cooling apparatus and a cooling method for heat assisted magnetic recording media substrate are provided. The cooling apparatus includes a chamber that is configured to receive a substrate. A substrate holder secures the substrate inside the chamber. The apparatus has a cooling plate that is movable between a retracted position and an extended position inside the chamber. The cooling plate provides clearance for movement of the substrate holder inside the chamber in the retracted position, and the cooling plate cools the substrate in the extended position. Also, the cooling plate is substantially parallel to and spaced apart from the substrate. The apparatus further includes a cryogenic operatively coupled to the cooling plate that is cooled by the cryogenic cooling element.

Method and apparatus for cryogenic dynamic cooling

A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.

Processing system having magnet keeper

Systems and methods for uniformly implanting materials on substrates using directed magnetic fields are provided. One such system includes a chamber configured to receive a preselected material and to enclose a first substrate, first and second rotating assemblies configured to facilitate an implantation of the preselected material onto first and second surfaces of the first substrate and including first and second rotating magnet sub-assemblies configured to direct magnetic fields onto the first and second surfaces, and an RF energizer configured to apply RF energy to the first substrate, where the first magnetic field and the second magnetic field combine to form a resultant magnetic field that is substantially parallel along the first surface, and where the implantation of the preselected material onto the first substrate occurs based on a combination of the RF energy and the resultant magnetic field.

Systems and methods for uniformly implanting materials on substrates using directed magnetic fields

A disk processing system with a load chamber having a stationary heater and a movable heater.

Load chamber with dual heaters

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San Jose, CA, United States of America

Yew Ming Chiong