Yeongwon Kang

Giwoong Nam

Jaeseung Lee

Sanghyun Park

Taekyu Choi

Inho Son

Jin Kwak

The present application relates to a developing apparatus. The developing apparatus comprises a housing; a wafer support disposed within the housing and for holding a wafer; a semipermeable diaphragm disposed within the housing and separating the housing into an upper housing defining an upper chamber and a lower housing defining a low chamber, wherein the semipermeable diaphragm is semipermeable to moisture such that moisture is allowed to move from the lower chamber to the upper chamber, but liquid drops are prohibited to move from the upper chamber to the lower chamber; and a nozzle assembly disposed above the wafer support and for spraying at least developer to the wafer support.

Growing community of inventors

Gyeonggi-do, South Korea

Yeongwon Kang