Samsung Display Co., Ltd.

Yeonghwan Ko

Gyoowan Han

Yoongyeong Bae

Jooseob Ahn

Taekil Oh

A laser etching apparatus includes a light source to emit a first laser beam having a first energy profile; and a scanner to radiate a second laser beam upon an object along a circular path, the second laser beam having a second energy profile different from the first energy profile.

Laser etching apparatus and laser etching method using the same

A laser apparatus may include a laser generator generating at least one a laser beam, which is used as an input light, an optical system converting the input light, which is provided from the laser generator, into a plurality of pattern lights, and a stage, on which a target object is loaded. The output light may be irradiated onto the target object. The optical system may divide the input light into a plurality of divided lights, and the pattern lights may be produced by constructive interference of the plurality of divided lights. A diameter of each of the pattern lights may be smaller than a diameter of the input light.

Growing community of inventors

Yongin-si, South Korea

Yeonghwan Ko