Molecular Imprints, Inc.

Canon Nanotechnologies, Inc.

Yeong-Jun Choi

Byung-Jin Choi

Mario Johannes Meissl

Sidlgata V Sreenivasan

Daniel Babbs

Anshuman Cherala

Ian Matthew McMackin

Steven C Shackleton

Xiaoming Lu

Kosta S Selinidis

Norman E Schumaker

Liang Kai Wang

Mahadevan Ganapathisubramanian

Nano imprint lithography templates for purging of fluid during nano imprint lithography processes are described. The templates may include an inner channel and an outer channel. The inner channel constructed to provide fluid communication with a process gas supply to a region between the template and a substrate during the nano imprint lithography process. The outer channel constructed to evacuate fluid and/or confine fluid between the active area of template and the substrate.

Imprint lithography template

A loading unit, surface scanning module, and an imprint module may be integrated into a single tool. Template may be loaded on loading unit and positioned within imprint module. Substrate may then be loaded on loading unit and scanned defects using surface scanning module. If substrate passes inspection by surface scanning module, substrate may be positioned imprint module where formable material may be dispensed thereon and imprinted. The imprinted substrate may then be unloaded from imprinting module.

Imprint lithography system and method

Systems to control an atmosphere about a substrate are described. The systems include a wall coupled to the substrate to create a resistance of the flow between different regions of the substrate.

Method to control an atmosphere between a body and a substrate

The present invention is directed towards a method of controlling an atmosphere about a substrate, the method including, inter alia, positioning a body a distance from a surface of the substrate, the body having a wall coupled thereto placed in a position to create a flow resistance of a fluid between first and second regions of the substrate; and altering the position of the wall such that when a magnitude of the distance between the body and the surface of the substrate is decreased, a probability of the wall contacting the substrate is minimized.

The present invention is directed towards a method of expelling a gas positioned between a substrate and a mold, the substrate and the mold further having a liquid positioned therebetween.

Method for expelling gas positioned between a substrate and a mold

The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.

Method of separating a mold from a solidified layer disposed on a substrate

The present invention is directed towards a system to control an atmosphere about a substrate, the system including, inter alia, a body spaced-apart from a surface of the substrate a distance; a supply of fluid coupled to introduce a flow between the body and the substrate; and a wall coupled to the body to create a resistance of the flow between first and second regions of the substrate, with a position of the wall being varied in response to a decrease in a magnitude of the distance.

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Cedar Park, TX, United States of America

Yeong-Jun Choi