Applied Materials, Inc.

Yenwei Hung

Boon Sen Chan

Sidda Reddy Kurakula

Yash Chhabra

Chandrasekhar Roy

Abyaya Dhar

Chih Chuan Wang

A method includes identifying an image of a substrate processing equipment part that forms a plurality of holes. The method further includes determining, by a processing device based on the image, a corresponding neighboring angular distance of each of the plurality of holes and a corresponding area of each of the plurality of holes. The method further includes identifying, by the processing device, a first subset of the plurality of holes that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes. A corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.

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Taoyuan, Taiwan

Yenwei Hung