Tokyo Electron Limited

Yenrui Hsu

Nobuhiro Ogata

Yusuke Hashimoto

Hiroki Sakurai

Kenji Yada

Daisuke Goto

Kanta Mori

Shoki Mizuguchi

A nozzle that mixes fluid containing steam or mist of pressurized pure water and processing liquid containing at least sulfuric acid and ejects mixed fluid of the fluid and the processing liquid, the nozzle comprising: at least one first ejection port ejecting the fluid; at least one second ejection port ejecting the processing liquid; and at least one lead-out path being in fluid communication with the at least one first ejection port and the at least one second ejection port and leading out the mixed fluid of the fluid ejected from the at least one first ejection port and the processing liquid ejected from the at least one second ejection port, wherein the at least one first ejection port or the at least one second ejection port is arranged to be directed to position deviated from central axis of the at least one lead-out path in a plan view.

Nozzle, substrate processing apparatus, and substrate processing method

Growing community of inventors

Koshi, Japan

Yenrui Hsu