Knowles Electronics, Inc.

Qorvo US, Inc.

Yenhao Chen

Jeremy Johnson

Sung Bok Lee

John J Albers

Alyssa Kueffner

Yaoyang Guo

Jeremy Hui

Jonathan Reeg

An acoustic transducer comprises a transducer substrate, and an aperture having a non-circular perimetral shape defined through the transducer substrate. A diaphragm is disposed on the transducer substrate and coupled to a surface of the transducer substrate via at least one diaphragm anchor such that a gap is defined between the diaphragm and the transducer substrate, and an outer periphery of the diaphragm extends radially outwards of a rim of the aperture such that a portion of the diaphragm overhangs the aperture.

Acoustic transducers for microphone assemblies having non-circular apertures

A MEMS can include a substrate including a first side and a second side on an opposite side of the substrate from the first side. The MEMS device can include an aperture running through the substrate from the first side to the second side. The substrate can have an edge surrounding the aperture on the first side. The MEMS device can include a diaphragm located over the aperture on the first side. The MEMS device can include a support structure that extends at least partially across the aperture from the edge.

MEMS device including a support structure

A microelectromechanical system (MEMS) motor includes a substrate, a backplate, and a diaphragm. The substrate has a first surface and a second surface. The second surface has a slot that extends at least partially into the substrate. A port extends through the substrate. The backplate is mounted to the first surface of the substrate, and the backplate covers at least a portion of the port. The diaphragm is between the backplate and the substrate. The diaphragm moves with respect to the backplate in response to acoustic energy that passes through the port.

Acoustic relief in MEMS

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San Jose, CA, United States of America

Yenhao Chen