Applied Materials, Inc.

Ye Y Liu

Eng Sheng Peh

Cheng Sun

Arunkumar Tatti

Muhammad Danial Bin Mohamed Yunos

Karthik Elumalai

Embodiments disclosed herein include an apparatus that includes an electrostatic chuck (ESC). The electrostatic chuck may include a first body that is electrically conductive, and a ceramic insert on the first body with an electrode embedded within the ceramic insert. In an embodiment, the apparatus may further include a facility plate that is coupled to the ESC. The facility plate may include a second body that is electrically conductive with a hole through the second body. In an embodiment, a DC input connector is provided through the hole, and an RF feed line is coupled to the second body. In an embodiment, a pin of the DC input connector is electrically isolated from the RF feed line.

Growing community of inventors

Singapore, Singapore

Ye Y Liu