Other

Sungkyunkwan University

Ye Ji Shin

Geun Young Yeom

Dong Hwan Shin

Hyun Woo Tak

Kyung Chae Yang

Da In Sung

Seung Eun Cha

Disclosed is an inductively-coupled plasma-generating device including: a first power supply for supplying high frequency power; a second power supply for supplying low frequency power; a single coil-based plasma source including at least two antennas which comprise a first antenna having one end as a grounded end and the other end, wherein the first power supply is connected to the first antenna at a point thereof adjacent to the grounded end to receive the high frequency power; and a second antenna surrounded by the first antenna, wherein the second antenna has one end connected to the first antenna and the other end as a low frequency power receiving end connected to the second power supply; and a gas supply for supplying a gas, wherein the gas is excited into plasma by the single coil-based plasma source.

Apparatus for generating plasma and apparatus for treating substrate having the same

The present disclosure relates to an apparatus for detecting a defect and a method for detecting a defect using the same, and more particularly, to an apparatus for detecting a defect and a method for detecting a defect using the same for detecting a defect inside an inspection object without destructing the inspection object. An apparatus for detecting a defect according to an embodiment of the present invention includes a first probe unit configured to transmit a signal into an inspection object and receive a signal generated inside the inspection object, a second probe unit separately installed from the first probe unit and configured to receive the signal generated inside the inspection object, and a position determining unit configured to detect a defect position inside the inspection object using the signal received by the first probe unit and the signal received by the second probe unit.

Apparatus for detecting defect and method for detecting defect using the same

Growing community of inventors

Hwaseong-si, South Korea

Ye Ji Shin