Boe Technology Group Co., Ltd.

Chengdu Boe Optoelectronics Technology Co., Ltd.

Yayu Wang

Yu Zhang

Zubin Lv

Jingshuai Wang

Kang Luo

Chenliang Liu

Yin Xie

Rujian Li

Yongzhou Ling

An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

Excimer laser generator and excimer laser annealing equipment

Growing community of inventors

Beijing, China

Yayu Wang