Hitachi-High-Technologies Corporation

Hitachi High-Tech Corporation

Hitachi, Ltd.

Hitachi High-Technologies Corpoartion

Yayoi Konishi

Masaki Takano

Masako Nishimura

Tohru Ando

Shotaro Tamayama

Naoko Ushio

Mitsugu Sato

Mami Konomi

Shunya Watanabe

Kunji Shigeto

Fuka Matsudaira

Miho Mizutani

Satoshi Yokotsuka

Misato Fukami

Etsuji Katono

Miyako Iida

Takafumi Usui

Hideki Watanabe

Hiroyuki Noda

Wataru Takeuchi

Tsutomu Saito

Noriko Iizumi

Junichi Kuwata

Ryuichiro Tamochi

Mitsugu Yamashita

Takahiro Inada

Shoutarou Tamayama

Michihiro Takayama

Masataka Okayama

Motoki Matsuno

Jin Shimizu

Display screen with graphical user interface

Display screen or portion thereof with graphical user interface

For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

Charged particle beam apparatus, specimen observation system and operation program

An image display device displays operation items of an electron microscope on an operation screen, and a storage device stores information of assist buttons which display image state information acquired via a detector of the electron microscope. The information of the assist buttons corresponds to image quality of an acquired image via the detector as well as to observation conditions composed of a combination of parameter setting values of the electron microscope, an operation program which analyzes the image quality of the acquired image. The information of the assist buttons is acquired based on analytical results of the image quality as well as current observation conditions, and the assist buttons are displayed on a predetermined part of the operation screen. Accordingly, the skills of a novice user operating a charged particle beam apparatus can be improved.

Growing community of inventors

Tokyo, Japan

Yayoi Konishi