Rockwell International Corporation

Yau-Wai D Chan

Robert L Zwingman

Keh-Fei C Chi

Rebecca Y Tang

Patricia C Elkins

Karen A Reinhardt

A method of providing a planar or iso-planar surface to the interlevel dielectric layer between metal layers of a multilevel MOS wafer includes applying a first dielectric over the first metal layer, applying a layer of spin-on glass over the first dielectric layer, etching the spin-on glass layer in an etch process in which the rate of etch of the spin-on glass is approximately the same as the rate of etch of the first dielectric to reveal at least a portion of the first dielectric layer. A second dielectric layer is placed over the surface of the first dielectric. Vias may then be defined through the dielectric layers, and the second metal layer may be applied over the relatively smooth surface of the second dielectric layer.

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Fullerton, CA, United States of America

Yau-Wai D Chan