Ulvac, Inc.

Yasuzo Tanaka

Junpei Yuyama

Mitsuru Yahagi

Hirofumi Minami

Makoto Takahashi

Shinya Ito

Masao Murata

Hiroto Uchida

Koji Hane

Hiroshi Koshina

Takanori Tsuji

Yuya Inoue

A stage apparatus enables easy position alignment at a real installation site. Mountshaving sub base platesarranged thereon are provided on carriagesand thereby constitute sub mounting tablesto; and the mountsare fixed to a main mounting tablehaving a main base plate. The positions of main base plateand sub base platesare aligned with each other by adjustment mechanismsprovided on the sub mounting tablesto. As main positioning membersand sub positioning membersare arranged on the main mounting tableand sub mounting tablesto, separation can be performed so that a state of position alignment is restorable. Accordingly, position alignment is easy when assembling after transportation.

Stage apparatus

An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.

Stage apparatus assembling method

A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base platewith positional alignment performed therebetween, the accuracy in positional alignment of the sub base plates which has already been fixed to the main base plate is not affected.

Providing a spacer forming method by which spacers can be securely formed in a predetermined region on a substrate. Ink containing granular spacers is jetted onto a crossing portion of a black matrixin the shape of a lattice. Red pixel R, green pixel G and blue pixel B are formed in the openings of the lattice. The spacer containing ink is jetted onto the spacer forming positions from the nozzle by the ink jetting method. Plural drops of inkare jetted onto each of the spacer forming positions on one of the opposite substrates E. The gap between the opposite substrates E can be securely maintained at a constant for filling with liquid crystal.

Spacer forming method and spacer forming apparatus

According to a first invention, since a flow of a spacer dispersed liquid is formed in a transporting chamber separated from a discharging chamber by an internal filter, the spacer dispersed liquid is stably discharged through an ejection hole, while the discharging chamber on a side of a nozzle plate is not affected by the flow of the spacer dispersed liquid. According to a second invention, since a spacer dispersed liquid does not flow inside a discharging chamber in a printing state in which the spacer dispersed liquid is discharged, the spacer dispersed liquid is stably discharged through an ejection hole. To the contrary, since the spacer dispersed liquid is directed inside both the discharging chamber and the transporting chamber in a waiting state in which the spacer dispersed liquid is not discharged, spacer particles in the spacer dispersed liquid do not settle.

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Chigasaki, Japan

Yasuzo Tanaka