Fujikin Inc.

Tokyo Electron Limited

Yasuyuki Omata

Michio Yamaji

Nobukazu Ikeda

Tsutomu Shinohara

Wataru Okase

Shuji Moriya

Toshihide Yoshida

Yasutaka Hayashi

Yuji Kawano

Shigeaki Tanaka

Hideki Fujimoto

Naoyuki Sato

Noboru Uzawa

Masakazu Fukui

A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same

A fluid control apparatus comprises lines A , A , A , A , A , B , B , B each removably attached to a substrate by a plurality of brackets , and channel communication means which are removable upward.

Fluid control apparatus and gas treatment system comprising same

Growing community of inventors

Osaka, Japan

Yasuyuki Omata