Hitachi, Ltd.

Hitachi-High-Technologies Corporation

Yasuyuki Momoi

Toshihiko Horiuchi

Masahiko Inoue

Takao Konno

Kazuhiro Umekita

Wataru Yamagishi

Shigeru Haneda

Masaharu Sugano

Yuuji Tadano

Hironori Ogawa

Masahiro Koyama

Naoki Sakamoto

Tsuyoshi Kai

Ichiro Sakuma

Masaki Odai

Norihisa Miyake

Akito Tanokuchi

Kaname Takahashi

Takeyoshi Dohi

Hiroshi Sakairi

Masashi Shibahara

Nobuhiko Sugano

Shizuko Hattori

Tsutomu Fujimoto

Kazuo Yonenobu

Yoshinobu Sato

Yoshikazu Nakajima

Toshihiko Sasama

Madoka Sugiura

Takahiro Ochi

A sinusoidal signal that is frequency-swept so as to have a frequency region in which each frequency has a different number of cycles and/or application duration is applied to a control system in a movement device that moves a movement target, time-series data for transmission characteristics obtained from said control system as a result of the application of the aforementioned sinusoidal signal is acquired, and said time-series data is subjected to spectral analysis. This allows the provision of a positioning control device and a frequency-characteristics measurement method that make it possible to optimize measuring precision while minimizing increases in the amount of time it takes to measure frequency characteristics.

Frequency-characteristics measurement method and positioning control device

In order to provide a stage apparatus with high speed stability in addition to being able to achieve positioning with a high degree of accuracy, and a sample observation apparatus, such as an optical microscope and a scanning electron microscope, including the stage apparatus, the stage apparatus and the sample observation apparatus of the present invention correct a command voltage value of standard waveform data or an output timing of a command voltage value such that a difference between a first time history response and a second time history response is reduced to zero, the first time history response for displacement or speed when the stage mechanism is driven with use of the standard waveform data showing the command voltage value at each predetermined time and the second time history response for displacement or speed when a speed of the stage mechanism is constant, to be set as drive waveform data to be outputted to a drive unit of the stage mechanism.

Stage apparatus and sample observation apparatus

In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.

Stage device and control method for stage device

A position measuring apparatus, for use in an assisting apparatus for surgical opertions, includes a position indicating apparatus for indicating a position and a direction of a tool, and three-dimensional position measuring apparatus for measuring a position and a direction of a surgical field and also the position and the direction of the tool. The position indicating apparatus and the three dimensional position measuring apparatus are unified in one body in the relative position thereof, so that a position for assistance of surgical operation is indicated in the form of an intersection line or an intersection point of the laser beams, irrespective of the position of the position measuring apparatus.

Position measuring apparatus

A calculating device and method provided for a shaking test apparatus for carrying out a shaking test on a structure by using a partial structure and a numerical model which is virtually connected to the partial structure. The calculating device includes a calculation part which identifies a vibration model corresponding to the partial structure on the basis of displacement and reaction force detected in response to shaking and which combines the vibration model and the numerical model with each other to construct a model of the overall system corresponding to the structure and calculates the shaking response of the overall system model.

Shaking test apparatus and method for structures

The testing performs a vibration excitation testing of a part of the structure, performs a numerical calculus of vibration response of the other parts of the structure, and calculates the vibration response of a whole of the structure by combining these two methods. Testing includes calculating a position of a point of exciting force on the basis of vibration exciting, and calculating a reaction force on the basis of a load detected and the position of the point of exciting force. Then, a displacement of a numerical model is computed by using the reaction force calculated and a known external force, and calculating a vibration exciting machine displacement command value on the basis of the displacement. A drive drives the vibration exciting on the basis of an output thereof. Vibration excitation is performed in the translational direction as well as the rotational direction.

Vibration exciting apparatus and vibration testing apparatus for structure using same

The present invention discloses a testing system and a testing method for a structure which tests a structure made of a test piece structure and a numerical model virtually connected to the structure. A simulated structure including a frame, an actuator and a reaction force measuring device is mounted on a foundation on which a shaking table is also mounted. Only the test piece structure is mounted on the shaking table. The motion of the shaking table which is generated at the time of shaking the test piece structure using the shaking table and the actuator is measured by a shaking table motion measuring device, while the reaction force generated by the test piece structure is measured by a reaction force measuring device. Using these measured values and the numerical model stored in a digital computer, the motion of the test piece structure after a predetermined period for the motion of the simulated structure is calculated. The actuator and the shaking table are driven so as to make this calculated motion.

Testing system and testing method for structure

Multiple degree of freedom vibration exciting apparatus and system

A shaking response is estimated with high precision by performing a shaking test f or combining and estimating a shaking characteristic of a partial structure of an object under test obtained through a shaking test and a shaking response of the whole structure which is numerically modeled. In a shaking test apparatus and method, a structure under test comprises a partial structure and a numerical model which is virtually connected to the partial structure. First, a vibration model corresponding to the partial structure is assumed, the numerical model and the vibration model are combined to construct an overall-system model, and then the vibration response of the overall-system model is calculated. On the basis of the calculation result and the signal input from a waveform oscillator, the partial structure is shaken by using a shaker. The displacement and reaction force of the partial structure are measured by a displacement gauge and a load cell, the vibration model is corrected on the basis of the measurement value and the overall-system model is reconstructed. This procedure is repeated to construct the overall-system model with high precision.

A computer-implemented control method and a control apparatus of factory automation system having a cell formed by a plurality of working machines including at least one automated machine to execute a series of works in accordance with a control program. From a cell control program including specifications of working of entire cell that is input to the computer, information relating to working sequence of a plurality of working machines and information about control of inputs and outputs of a plurality of working machines are described, the specifications and informations are extracted by the computer. On the basis of the extracted information, a sequence control program by which control of the working sequence of a plurality of working machines and control of inputs and outputs of a plurality of working machines is generated by the computer are described. From the cell control program, information about operation control of the automated machine and information about synchronization of operation of the working machines are extracted by the computer. On the basis of the extracted information, an automated machine control program, by which processing for exercising control over positioning and operation trajectory of the automated machine are described, is generated by the computer. And working of the cell is controlled in accordance with the sequence control program and the automated machine control program.

Control method and control apparatus of factory automation system

Growing community of inventors

Ushiku, Japan

Yasuyuki Momoi