Ngk Insulators, Inc.

Yasuyoshi Imai

Tetsuya Kawajiri

Kazuhiro Nobori

Tomoyuki Fujii

Hiroto Matsuda

An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1&#xd7;10&#x3a9;&#xb7;cm at room temperature and a volume resistivity equal to or greater than about 1&#xd7;10&#x3a9;&#xb7;cm at 300&#xb0; C., and an electrode formed on one surface of the dielectric ceramic layer.

Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

A method of fabricating a substrate placing stage includes the step of providing a plate-shaped ceramic base having a substrate placing surface on a side of the ceramic base. The method includes the step of providing a plate-shaped ceramic base formed of a composite material containing components of a ceramic material and an aluminum alloy. The method includes the step of inserting a joint material including an aluminum alloy layer between the ceramic base and the cooling member. The method includes the step of heating the joint material at a temperature in a range from TS &#xb0; C. to (TS-30) &#xb0;C. (TS &#xb0;C.: a solidus temperature of the aluminum alloy). The method includes the step of pressing substantially normally joint surfaces of the ceramic base and the cooling member, thereby joining the ceramic base and the cooling member via the joint material to obtain a joint layer including the aluminum alloy layer having a thickness in a range from 50 &#x3bc;m to 200 &#x3bc;m after joining.

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Nagoya, Japan

Yasuyoshi Imai