Olympus Corporation

Yasutoshi Kitahara

Shunsuke Kurata

Yasunori Ikeno

Katsuyuki Hashimoto

Haruyuki Tsuji

Masahiko Yazawa

Yoshiaki Suge

A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.

Method and apparatus for inspecting semiconductor wafer

A semiconductor wafer inspection apparatus is provided with a rotatable table on which a semiconductor wafer is held by suction, an illuminating device which illuminates at least an edge portion of the semiconductor wafer held on the rotatable table, an imaging device which captures an image of the edge portion of the semiconductor wafer when the edge portion is illuminated by the illuminating device, an image processing device which detects at least an edge cut amount or a crack by acquiring the image of the edge portion which is captured by the imaging device, and a display section which displays an image of the edge portion subjected to image processing by the image processing device.

Semiconductor wafer inspection apparatus

Growing community of inventors

Ina, Japan

Yasutoshi Kitahara