Seiko Epson Corporation

Yasuto Kakemura

Takayuki Yonemura

Kazuya Kitada

Tomohiro Sakai

Hidemichi Furihata

A piezoelectric body contains potassium, sodium, and niobium, and has a perovskite structure. A Raman shift of peaks assigned to Aobtained by performing Raman spectroscopic analysis on a plurality of measurement regions is 400 cmor more and 700 cmor less. A difference between a maximum value and a minimum value of the Raman shift among the peaks in the plurality of measurement regions is 11.0 cmor less.

Piezoelectric body, piezoelectric element, and liquid ejection head

A piezoelectric device includes: a first electrode provided above a substrate; a piezoelectric layer provided above the first electrode; and a second electrode provided above the piezoelectric layer. The piezoelectric layer includes a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium. The piezoelectric layer has a first region and a second region in a 3 &#x3bc;m&#xd7;3 &#x3bc;m region of a plane perpendicular to a thickness direction of the piezoelectric layer. The first region is a region in which the ratio of an atomic concentration (atm %) of potassium with respect to the sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is 0.30 to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75.

Piezoelectric device, liquid ejection head, and printer

A piezoelectric element includes: a first electrode provided on a base; a second electrode; and a piezoelectric layer that is provided between the first electrode and the second electrode and that contains a complex oxide having a perovskite structure and including potassium, sodium, and niobium, where: a surface of the piezoelectric layer on a side of the second electrode is composed of faces of first grains and faces of second grains; a roughness height on the faces of the first grains is larger than a roughness height on the faces of the second grains; and an area occupied by the faces of the first grains is 10.0% or less on the surface of the piezoelectric layer.

Growing community of inventors

Kai, Japan

Yasuto Kakemura