Ibiden Company Limited

Toyota Jidosha Kabushiki Kaisha

Denso Corporation

Tokyo Electron Limited

Yasutaka Ito

Yasuji Hiramatsu

Satoru Kariya

Masakazu Furukawa

Jo Saito

Tomoyoshi Nakamura

Jin Wakamatsu

Masahiro Yamamoto

Takehito Kimata

Daisuke Suzuki

Fumiyuki Mutsuda

Hisashi Ando

Takeshi Ushida

Koji Ohshika

Yanling Zhou

Kazuteru Ohkura

Kazutaka Mashima

Atsushi Ozaki

Atsushi Ito

Yuya Sugiura

Tsutomu Sato

Reo Uchimura

Yasuiji Hiramatsu

Tatsuya Watanabe

A particulate-matter detecting sensor including an insulating substrate which has a detecting face, detecting conductors formed in the insulating substrate, and a heating section formed on the insulating substrate. Each detecting conductor includes a detecting electrode part, a terminal part, and a connecting part. A portion of the detecting conductor is constituted of a noble metal conductor mainly formed of at least one noble metal selected from Pt, Au, Pd, Rh and Ir. At least a portion of the connecting part is formed of a low expansion conductor mainly formed of a low expansion coefficient metal having linear expansion coefficient lower than that of the noble metal. Both conductors are joined at an overlapping part at which the noble metal conductor and the low expansion conductor are partly overlapped with each other on an insulating layer forming the insulating substrate in a normal line direction of the insulating layer.

Particulate-matter detecting sensor element

The present invention aims to provide a sound-absorbing material having sound absorption performance with an average sound absorption coefficient of 0.65 or more in the frequency domain of 800 to 2000 Hz. The present invention relates to a sound-absorbing material including: a fiber layer including a plurality of holes open to a surface thereof and having a thickness of 3 mm or more; and an inorganic material layer formed on the surface of the fiber layer, the holes being blind holes each penetrating through the inorganic material layer and having a bottom inside the fiber layer.

Sound-absorbing material

The diffusing member of the present invention is disposed in an exhaust pipe to partially block exhaust gas flowing in from upstream of the exhaust pipe, the diffusing member including a ceramic member and a metal member, wherein the ceramic member surrounds the metal member in such a manner that the metal member is partially exposed, and the volume of the ceramic member constituting the diffusing member is larger than the volume of the metal member constituting the diffusing member.

Diffusing member, exhaust gas purification device, and use of diffusing member in exhaust gas purification device

A structure of the present invention is the structure which is formed of a base made of a metal and an inorganic material surface layer made of crystalline and amorphous inorganic materials, wherein thermal conductivity of the inorganic material surface layer is lower than the thermal conductivity of the base, infrared emissivity of the inorganic material surface layer is higher than the infrared emissivity of the base, and the base is an annular body.

Annular structure having excellent heat insulating and heat releasing properties

A holding seal material made of a laminated mat configured by laminating a plurality of mats containing an inorganic fiber and having a rectangular planar shape so that longitudinal-direction lengths of the respective mats sequentially increase as the mats are laminated, in which the film is attached to a principal surface of the mat configuring the laminated mat and having a longest longitudinal-direction length on an opposite side to a side on which the mat having the longest longitudinal-direction length is in contact with other mats and longitudinal-direction side surfaces of the mat having the longest longitudinal-direction length, and the film is attached to a principal surface of the mat having the longest longitudinal-direction length on the side on which the mat having the longest longitudinal-direction length is in contact with other mats in a state in which a part of the principal surface is exposed.

Holding seal material, manufacturing method for holding seal material, exhaust gas purification apparatus and manufacturing method for exhaust gas purification apparatus

An object of the present invention is to provide an exhaust pipe in which a peeling of a constituent member does not occur and reliability thereof is excellent, and an exhaust pipe allowing exhaust gases to flow through the exhaust pipe of the present invention includes a heat-releasing layer containing a crystalline inorganic material and an amorphous inorganic material and having infrared emissivity higher than infrared emissivity of a base, wherein irregularities are formed on a surface of the base on which the heat-releasing layer is to be formed.

Exhaust pipe

An object of the present invention is to provide an exhaust pipe that can lower the temperature of exhaust gases when the exhaust gases having a high temperature pass through the exhaust pipe. The exhaust pipe of the present invention, which allows exhaust gases to flow through the exhaust pipe, comprises a base that contains metal and has a cylindrical shape; and a surface-coating layer that contains a plurality of crystalline inorganic materials and an amorphous binder and is formed on the outer peripheral face of the base, wherein the plurality of crystalline inorganic materials are distributed in the surface-coating layer, in an accumulative manner in a thickness direction, and the amorphous binder has an average thickness of 20 &#x3bc;m or less at a location nearer the outer peripheral face of the exhaust pipe than a location of the crystalline inorganic materials.

The inorganic fiber article according to the present invention is an inorganic fiber article comprising an inorganic coating layer having foams, the inorganic coating layer formed on at least a portion of the surface of an inorganic fiber molded body.

Inorganic fiber article

A ceramic board is provided which, when used as a heater, heats a silicon wafer uniformly throughout and, hence, does not damage the wafer and, when used as an electrostatic chuck, provides a sufficient chucking force. A ceramic board is provided for semiconductor manufacture apparatuses comprising a ceramic substrate and a semiconductor wafer mounted thereon directly or supported indirectly at a fixed distance from its surface, wherein the surface of said ceramic substrate, where said semiconductor wafer is to be mounted or supported, is controlled to a flatness of 1 to 50 &#x3bc;m over a measurement range of [(diametric end-to-end length)&#x2212;10 mm].

Semiconductor production device ceramic plate

A ceramic substrate for semiconductor manufacture and/or inspection which is conducive to decrease in &#x3b1;-rays radiated to prevent electrical errors, and to decrease an electrostatic chucking force such as heater or wafer prober, generation of particles, and circuit defects. The ceramic substrate is configured such that the level of &#x3b1;-rays radiated from the surface of the ceramic substrate is not higher than 0.250 c/cm.hr.

Ceramic substrate, ceramic heater, electrostatic chuck and wafer prober for use in semiconductor producing and inspecting devices

A semiconductor-producing/examining device that can maintain a preferable connection state for a predetermined period of time and that can easily remove a ceramic substrate from a supporting case. The semiconductor producing/examining device includes a ceramic substrate having a conductor layer formed on the surface thereof or inside thereof and a supporting case. An external terminal is connected to the conductor layer. A connection between the conductor layer and the external terminal is performed such that the external terminal is pressed on the conductor layer or the external terminal is pressed on another conductor layer connected to the conductor layer by using the elastic force and the like of an elastic body.

Device used to produce or examine semiconductors

An objective of the present invention is to provide an aluminum nitride sintered body making it possible to keep a volume resistivity of 10&#x3a9;&#xb7;cm or more, and guarantee covering-up capability, a large radiant heat amount and measurement accuracy with a thermoviewer. A carbon-containing aluminum nitride sintered body of the present invention of the present invention comprising: carbon whose peak cannot be detected on its X-ray diffraction chart or whose peak is below its detection limit thereon; in a matrix made of aluminum nitride.

Carbon-containing aluminum nitride sintered compact and ceramic substrate for use in equipment for manufacturing or inspecting semiconductor

The object of the present invention is to provide a ceramic substrate that can provide a substantially uniform temperature distribution to a surface of the ceramic substrate where a semiconductor wafer is treated. A ceramic substrate for a semiconductor-producing/examining device according to the present invention is a ceramic substrate having a conductor formed on a surface of the ceramic substrate or inside the ceramic substrate, wherein said substrate is containing oxygen and having a disc form, the diameter thereof exceeding 250 mm and a thickness thereof being 25 mm or less.

Ceramic substrate for semiconductor production and inspection devices

A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections. Resistivities of the plural sections are measured, respectively. Each of the plural sections is trimmed according to a comparison between the resistivities of the plural sections.

Growing community of inventors

Gifu, Japan

Yasutaka Ito