Seiko Epson Corporation

Yasushi Tsuchiya

Takayuki Yonemura

Takafumi Noda

Eiji Kanda

Toshiharu Matsushima

Kimio Nagasaka

Yasuaki Hamada

Tokuro Ozawa

Takuya Miyakawa

Tsukasa Eguchi

Eiichi Fujii

Yasunori Hiyoshi

An atomic cell filled with an alkali metal includes: a substrate; a first coating layer provided on an inner wall of the substrate and derived from a first molecule; a second coating layer provided on the first coating layer, and derived from a second molecule having a non-polar group and a reactive group that undergoes a desorption reaction with the first molecule; and a third coating layer provided on the second coating layer and derived from a non-polar third molecule. The third coating layer has a degree of crystallinity of 70% or more.

Atomic cell, method for manufacturing atomic cell, and quantum interference device

A gas cell includes a cell main body having a first chamber defined by an inner wall, and a first paraffin film provided on the inner wall, wherein in the first chamber, a gas which interacts with an electromagnetic wave is stored, the first paraffin film is a pure paraffin film, and a paraffin constituting the first paraffin film is arranged such that the directions of the molecular axes are aligned.

Gas cell, magnetic field measurement device, and method for producing gas cell

A thermoelectric conversion element includes a pair of electrodes and a pyroelectric material, which is a ferroelectric layer, sandwiched between the pair of electrodes. The pyroelectric material includes at least Bi (bismuth), La (lanthanum), and Fe (iron). The molar fraction of La in a Bi/La site in the crystal structure of the pyroelectric material is 0.15 or more and 0.20 or less. Such a thermoelectric conversion element, and a light detection device and electronic apparatus which include the thermoelectric conversion element have a good pyroelectric function without including Pb (lead).

Thermoelectric conversion element, light detection device, electronic apparatus

An infrared sensor includes a heat sensing element, the heat sensing element includes a first electrode, a second electrode and a dielectric film formed between the first electrode and the second electrode. The heat sensing element senses heat based on a change of a resistance value. The dielectric film includes at least Bi and Fe.

Infrared sensor and heat sensing element

An infrared sensor includes a heat sensing element in which a first electrode, a dielectric film, and a second electrode are sequentially laminated; and an electric charge detection device. The dielectric film represents antiferroelectricity and has a spontaneous polarization in a predetermined measurement environment. The electric charge detection device calculates an amount of relaxation current flowing by a change of the spontaneous polarization, and senses heat of the heat sensing element based on temperature dependence of the amount of relaxation current.

Infrared sensor, heat sensing element, and heat sensing method using the same

A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a concave portion, a bottom surface of the concave portion forming a light-reflecting curved surface. The thermal detection element includes a light-absorbing film. The support member supports the thermal detection element with a cavity being provided between the substrate and the support member. The light-reflecting curved surface and the light-absorbing film overlap each other in plan view, the light-reflecting curved surface having a projected area in plan view larger than an area of the light-absorbing film.

Thermal detector, thermal detection device and electronic instrument, and method for manufacturing thermal detector

A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member; a light-reflecting layer formed at a position spaced apart from the heat-detecting element in at least a portion of a peripheral region of the heat-detecting element on the support member; a light-absorbing layer formed on the heat-detecting element and the light-reflecting layer; and a thermal transfer member that is connected to the heat-detecting element by a connector, the thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than a surface area of the connecting portion as seen in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength.

Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method

An image capturing apparatus includes a substrate in which multiple pixel circuits are formed and a driving unit that generates an image signal in which a target has been captured by driving the multiple pixel circuits. When the region in which the multiple pixel circuits is formed is taken as a capturing region, the capturing region includes a fingerprint capturing region for capturing a fingerprint and a vein capturing region for capturing veins.

Fingerprint and finger vein image capturing and authentication apparatuses

A sensing circuit having a first substrate, a second substrate, a layer of dielectric material, a first electrode, a second electrode and an electrostatic capacitance detection unit is provided. The second substrate faces the first substrate. The dielectric material is held between the first substrate and the second substrate. The first electrode and the second electrode are arranged between the dielectric material and the first substrate. The electrostatic capacitance detection unit is configured to produce a detection signal having an amplitude according to a value of capacitance formed between the first electrode and the second electrode through the dielectric material.

Sensing circuit, display device and electronic apparatus

A thermal detector includes a substrate, a support member, a heat-detecting element, a thermal transfer member, a first light-absorbing layer and a second light-absorbing layer. The support member is supported on the substrate so that a cavity is formed between the substrate and the support member. The heat-detecting element is supported on the support member. The thermal transfer member includes a connecting portion connected to the heat-detecting element and a thermal collecting portion formed over the heat-detecting element and having a surface area larger than a surface area of the connecting portion as seen in plan view. The first light-absorbing layer contacts the thermal transfer member and disposed between the thermal transfer member and the support member. The second light-absorbing layer contacts the thermal transfer member and disposed on the thermal transfer member.

A thermal detector includes a substrate; a support member supported on the substrate with a cavity interposed therebetween; a heat-detecting element formed on the support member; a first light-absorbing layer formed on the heat-detecting element and the support member so as to be in contact with the heat-detecting element; and a second light-absorbing layer formed on the first light-absorbing layer so as to be in contact with the first light-absorbing layer. The second light-absorbing layer has a higher refractive index than the first light-absorbing layer. A first wavelength resonates between a surface of the support member and an upper surface of the second light-absorbing layer, and a second wavelength, which is different from the first wavelength, resonates between an interface, at which the first light-absorbing layer and the second light-absorbing layer are in contact with each other, and the upper surface of the second light-absorbing layer.

A thermal detector manufacturing method includes: forming a sacrificial layer on a structure including an insulating layer; forming a support member on the sacrificial layer; forming on the support member a heat-detecting element; forming a first light-absorbing layer so as to cover the heat-detecting element, and planarizing the first light-absorbing layer; forming a contact hole in a portion of the first light-absorbing layer, subsequently forming a thermal transfer member having a connecting portion that connects to the heat-detecting element and a thermal collecting portion having a surface area greater than that of the connecting portion as seen in plan view; forming a second light-absorbing layer on the first light-absorbing layer; and removing the sacrificial layer to form a cavity between the support member and the structure including the insulating layer formed on the surface of the substrate.

A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a recess part with a bottom surface of the recess part being a curved light-reflecting surface. The thermal detection element has a light-absorbing film. The support member supports the thermal detection element. The substrate and the support member are arranged to form a hollow part therebetween. The support member includes a light-absorbing part in which impurities are dispersed in polycrystalline silicon with the light-absorbing part being arranged in at least a part of a surface of the support member facing toward the hollow part so that the light-absorbing part being irradiated by light.

Thermal detector, thermal detection device, and electronic instrument

A thermal detector includes a substrate; a support member supported on the substrate interposed by a cavity; a heat-detecting element formed on the support member and having a pyroelectric material layer disposed between a lower electrode and an upper electrode; a light-absorbing layer formed on the heat-detecting element; and a thermal transfer member including a connecting portion connected to the heat-detecting element and a thermal collecting portion disposed inside the light-absorbing layer and having a surface area larger than that of the connecting portion in plan view, the thermal collecting portion being optically transmissive at least with respect to light of a prescribed wavelength. The lower electrode has an extending portion extending around the pyroelectric material layer in plan view, and the extending portion has light-reflecting properties by which at least a part of the light transmitted through the thermal collecting portion of the thermal transfer member is reflected.

A thermal detector includes: a substrate; a support member supported so that a cavity is formed between the substrate and the support member; a heat-detecting element supported on the support member; a thermal transfer member disposed over the heat-detecting element, and including a thermal collecting portion made of a material having light-reflecting characteristics and having a pattern with which a portion of light incident to a region defined by the support member as seen in plan view enters towards the support member, and a connecting portion connecting the thermal collecting portion to the heat-detecting element; a first light-absorbing layer contacting the thermal transfer member between the thermal transfer member and the support member; and a second light-absorbing layer contacting the thermal transfer member and disposed on the thermal transfer member.

Growing community of inventors

Fujimi-machi, Japan

Yasushi Tsuchiya