Shin-etsu Chemical Co., Ltd.

Yasushi Takai

Noriaki Hamaya

Toshihiko Tsukatani

Yuji Kimura

Takao Maeda

Ryo Iwasaki

Kazuhiro Wataya

Masami Kaneyoshi

Hajime Nakano

Takehisa Minowa

Toshihiro Tsumori

Hirofumi Kawazoe

Shigeyuki Nakamura

Shigeru Sakai

Shigenobu Tajima

Kazuhiro Yamada

Takashi Toide

Iwao Kubota

A sprayed coating having a multilayer structure including a lower layer made a sprayed coating containing a rare earth oxide, and a surface layer made of another sprayed coating containing a rare earth fluoride and/or a rare earth oxyfluoride, the multilayered sprayed coating having a volume resistivity at 23° C. and a volume resistivity at 200° C., the volume resistivity at 23° C. being 1×10to 1×10Ω·cm, and a temperature index of the volume resistivities defined by the ratio of the volume resistivity at 200° C. to the volume resistivity at 23° C. being 0.1 to 10.

Sprayed coating, method for manufacturing sprayed coating, sprayed member and spraying material

An yttrium-base sprayed coating is obtained by thermally spraying yttrium oxide, yttrium fluoride or yttrium oxyfluoride onto a substrate to form a coating of 10-500 μm thick, and chemically cleaning the coating with a cleaning liquid of organic acid, inorganic acid or a mixture thereof until the population of particles with a size of up to 300 nm becomes no more than 5 particles/mmof the coating surface. The yttrium-base sprayed coating exhibits high corrosion resistance even in a halogen gas plasma atmosphere and prevents yttrium-base particles from spalling off during etching treatment.

Yttrium-based sprayed coating and making method

An yttrium fluoride sprayed coating having a thickness of 10-500 μm, an oxygen concentration of 1-6 wt %, and a hardness of 350-470 HV is deposited on a substrate surface. The yttrium fluoride sprayed coating exhibits excellent corrosion resistance in a halogen-base gas atmosphere or halogen-base gas plasma atmosphere, functions to protect the substrate from damage by acid penetration during acid cleaning, and minimizes particle generation from a reaction product and due to spall-off from the coating.

Yttrium fluoride sprayed coating, spray material therefor, and corrosion resistant coating including sprayed coating

Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.

Slurry for suspension plasma spraying, method for forming rare earth acid fluoride sprayed film, and spraying member

A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 μm, a total volume of ≤10 μm pores of 0.51-1.5 cm/g as measured by mercury porosimetry, and a BET surface area of 3-50 m/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700° C.

Film-forming powder, film forming method, and film-forming powder preparing method

A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 &#x3bc;m, a total volume of &#x2264;10 &#x3bc;m pores of 0.51-1.5 cm/g as measured by mercury porosimetry, and a BET surface area of 3-50 m/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700&#xb0; C.

An yttrium fluoride spray material contains YOFand YF, and has an average particle size of 10-60 &#x3bc;m and a bulk density of 1.2-2.5 g/cm. The YOFand YFin the yttrium fluoride spray material consist of 30 to 90% by weight of YOFand the balance of YF. A sprayed coating of yttrium oxyfluoride is obtained by atmospheric plasma spraying of the spray material.

Yttrium fluoride spray material, yttrium oxyfluoride-deposited article, and making methods

A slurry for use in suspension plasma spraying including a dispersion medium and rare earth oxide particles, the rare earth oxide particles having a particle size D50 of 1.5 to 5 &#x3bc;m and a BET specific surface area of less than 1 m/g, and a content of the rare earth oxide particles in the slurry being 10 to 45 wt %.

Slurry for suspension plasma spraying, and method for forming sprayed coating

A sprayed coating having a multilayer structure including a lower layer made a sprayed coating containing a rare earth oxide, and a surface layer made of another sprayed coating containing a rare earth fluoride and/or a rare earth oxyfluoride, the multilayered sprayed coating having a volume resistivity at 23&#xb0; C. and a volume resistivity at 200&#xb0; C., the volume resistivity at 23&#xb0; C. being 1&#xd7;10to 1&#xd7;10&#x3a9;&#xb7;cm, and a temperature index of the volume resistivities defined by the ratio of the volume resistivity at 200&#xb0; C. to the volume resistivity at 23&#xb0; C. being 0.1 to 10.

A spray material is defined as composite particles consisting essentially of (A) particles of rare earth fluoride and (B) particles of rare earth oxide, hydroxide or carbonate, consolidated together. The spray material is plasma sprayed onto a substrate to form a sprayed layer containing rare earth oxyfluoride in a consistent manner while minimizing the process shift and releasing few particles. The sprayed member has improved corrosion resistance to halogen-based gas plasma.

Spray material, sprayed member and making method

A spray material comprising rare earth element oxyfluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 &#x3bc;m, and a bulk density of 0.8-2 g/cm, and containing not more than 0.5 wt % of carbon and 3-15 wt % of oxygen is suitable for air plasma spraying. An article having a sprayed coating of rare earth element oxyfluoride has high resistance against plasma etching and a long lifetime.

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Echizen, Japan

Yasushi Takai