Matsushita Electric Industrial Co., Ltd.

Joled Inc.

Yasushi Naito

Toyokazu Fujii

Masanori Fukumoto

Hisashi Ogawa

Yuichi Hirofuji

Seiji Nishiyama

Hiroshi Yamamoto

Junji Hirase

Satoshi Shibata

Toshiki Yabu

Shinichi Imai

Ichiro Nakao

Shozo Okada

Yuka Terai

Chiaki Kudo

Tatsuo Sugiyama

Norisato Shimizu

Fumitoshi Kawase

Kazuhiro Matsuyama

Takatoshi Yasui

Yutaka Ito

Emi Kanasaki

Provided is a display panel having a plurality of pixels arranged in a matrix of rows and columns. Each of the pixels is composed of a plurality of first sub-pixels emitting light of different colors. Each of the first sub-pixels is composed of a plurality of second sub-pixels emitting light of the same color. Each of the second sub-pixels includes: a first electrode; a second electrode above the first electrode; and a light-emitting layer between the first electrode and the second electrode.

Display panel and production method for same

When the emissivity &#x3b5; on the reverse face of a substrateis measured during annealing processing for the substratefilms made from a material that varies the emissivity &#x3b5;, such as a first DPS filmused for forming a plugA, a second DPS filmused for forming a capacitor lower electrodeA and a third DPS filmused for forming a capacitor upper electrodeA, are formed on the top face of the substrateOn the other hand, no film made from a material that varies the emissivity &#x3b5;, such as a DPS film, is formed on the reverse face of the substrate

Method for measuring temperature, annealing method and method for fabricating semiconductor device

The invention relates to a high-density DRAM fabrication technique for forming a source/drain contact between word lines in a self-alignment manner, with the offset length between a source region and a drain region of a peripheral transistor maintained at an adequate value. After gate electrodes (i.e. word lines) are formed, a first insulating layer, which is thin enough not to block up space defined between the word lines, is deposited. The source/drain contact is etched as deep as the first insulating layer is thick to form an extraction electrode made of polycrystalline silicon. A second insulating layer is deposited until a spacer thickness (i.e. the sum of the film thickness of the second insulating layer and the film thickness of the first insulating layer) for determining the offset length is obtained. The first and second insulating layers are etched back for a distance corresponding to the sum of the film thickness of the second insulating layer and the film thickness of the first insulating layer so that a spacer (i.e. the residue of the insulating layers) is left on the side walls of the gate electrode. An implantation of highlevel impurities is performed to form heavily doped source and drain regions of a peripheral transistor. In-cell self-align contact is made possible while maintaining the offset length of the heavily doped source and drain regions

Method of fabricating a high-density dynamic random-access memory

A first underlaid oxide layer, a polysilicon layer, and a first silicon nitride layer are formed on a silicon substrate in this order. Using a photoresist as a mask, a portion of the first silicon nitride layer, the polysilicon layer, the first underlaid oxide layer and the silicon substrate which is to be an isolation region is etched by a depth which regulates a length of bird's beak and a threshold voltage drop of a FET adequately. After forming a second underlaid oxide layer and a second silicon nitride layer, silicon nitride side walls of more than 25 nm in thickness are formed. An isolation oxide layer is formed by selective oxidation, using the silicon nitride layer as a mask. Favorable etched depth in the step of removing the silicon substrate is one third of the thickness of the isolation oxide layer. Favorable etched depth in case of a normal FET is 20-100 nm. Thus, bird's beak length is reduced, while adequately maintaining the threshold of the transistor at formation of the isolation of transistor. In a DRAM cell pattern, isolation of not exceeding 0.2 .mu.m width can be formed.

Method of forming isolation

A semiconductor device comprising a semiconductor substrate, an insulating film formed on the semiconductor substrate, and a polycide film including a polysilicon layer and a silicide layer formed on the insulating film. The polysilicon layer includes a p-type region having p-type impurities diffused therein and an n-type region having n-type impurities diffused therein. The p-type impurities are implanted into the silicide layer in order to have a substantially uniform concentration over the entire portion thereof, so that the p-type impurities in the p-type region of the polysilicon layer do not diffuse into the silicide film by a post heat treatment.

Method for fabricating a semiconductor device comprising a polycide

A semiconductor device comprising a semiconductor substrate, an insulating film formed on the semiconductor substrate, and a polycide film including a polysilicon layer and a silicide layer formed on the insulating film. The polysilicon layer includes a p-type region having p-type impurities diffused therein and an n-type region having n-type impurities diffused therein. The p-type impurities are implanted into the silicide layer in order to have a substantially uniform concentration over the entire potion thereof, so that the p-type impurities in the p-type region of the polysilicon layer do not diffuse into the silicide film by a poet heat treatment.

Semiconductor device with a dual type polycide layer comprising a

A semiconductor device of the present invention includes a semiconductor substrate, a p-type impurity diffused region formed in the semiconductor substrate, and a polycide interconnection electrically connected to the p-type impurity diffused region. In the semiconductor device, the polycide interconnection includes a first polysilicon film, a refractory metal silicide film formed on the first polysilicon film, and a second polysilicon film formed on the refractory metal silicide film.

Semiconductor device and a method of fabricating the same

Described is a method for manufacturing semiconductor devices which includes a heat treating process for heating and cooling semiconductor substrates mounted on a boat at a predetermined pitch according to a predetermined temperature profile, in order to flatten the surface of each semiconductor substrate by reflowing an insulating film containing impurities, for example, a BPSG film formed on the substrate. In the heat treating process, one of the control factors which affects the formation of grains or particles due to the impurities contained in the insulating film is set so as to prevent the impurities from generating grains or particles during the heat treatment. Also disclosed is a method of preventing the generation of grains or particles by widening the pitch of the mounted substrates.

Method for manufacturing a semiconductor device using a heat treatment

A fabrication method for a semiconductor integrated circuits which permits the self-aligned formation of contact windows without causing shorts or breaks in the interconnecting lines in the device is provided. After forming gate electrodes and source/drain regions of transistors on a semiconductor substrate, an etch-stop layer and a BPSG film are successively deposited over the gate electrodes and the source/drain regions. After a resist having a contact window pattern is formed on the BPSG film, an isotropic dry etching using a microwave plasma is performed to etch the BPSG film. According to the isotropic dry etching, the laterally etching rate in the BPSG film can be controlled by adjusting the RF power, and a silicon dioxide film can be used as the etch stop layer. After the BPSG flow process, the etch stop layer on the contact region is etched away to form contact windows.

Method for fabricating a semiconductor integrated circuit device

In a method for manufacturing DRAMs in a stacked memory cell type, an edge portion of each bit line is bared upon etching a first insulating film, the bared edge portion is etched to from an opening and an inner peripheral surface of the opening is covered by a second insulating film. There is also disclosed a method wherein second and third insulating films and second conductive film are stacked on a first insulating film, a second conductive film is formed and the second conductive film and the first conductive film are partially etched whereby the unetched portions of the first conductive film serve as electrode planes of charge storage electrodes.

Method for manufacturing a semiconductor memory device

There are provided semiconductor devices including a semiconductor substrate having a surface divided into a first and second regions, a plurality of active regions formed on the substrate, and a local-oxidized (LOCOS) insulating film formed on the substrate as an isolation region for electrical isolation of the active regions from each other. The LOCOS insulating film is thicker in the first region than in the second region, or the LOCOS insulating film has a difference in level based on the thickness change in the vicinity of the boundary between the first and second regions. Also provided are various methods for producing such semiconductor devices.

Growing community of inventors

Osaka, Japan

Yasushi Naito