Rigaku Corporation

Yasushi Kusakabe

Yoshiyuki Kataoka

Shin Tanaka

An X-ray fluorescence spectrometer according to the present invention includes a calculation unit () configured to calculate a content of each element in a sample () using an FP method, wherein the calculation unit () is configured to: in order to take into consideration an influence of unmeasured elements for which the fluorescent X-rays are not measured, use shorter-wavelength scattered X-rays of primary X-rays having a wavelength of 0.05 nm or more and 0.075 nm or less, and longer-wavelength scattered X-rays of the primary X-rays having a wavelength of 0.11 nm or more and 0.23 nm or less as scattered X-rays whose intensities are measured by a detection unit (), assume a mean atomic number for elements other than hydrogen included in the unmeasured elements, and assume a content for hydrogen.

X-ray fluorescence spectrometer

Provided are a quantitative analysis method, a quantitative analysis program, and an X-ray fluorescence. The quantitative analysis method includes: a step of acquiring a representative composition set to represent contents of analysis components; a step of acquiring a plurality of comparative compositions, in each of which the content of one of the analysis components of the representative composition is changed by a predetermined content; a detection intensity calculation step of calculating a detection intensity indicating an intensity of fluorescent X-rays detected under the influence of the geometry effect through use of an FP method with respect to a virtual sample having a thickness set in advance and being indicated by each of the representative composition and the comparative compositions; and a step of calculating a matrix correction coefficient for each of the analysis components based on the detection intensity.

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Ibaraki, Japan

Yasushi Kusakabe