Canon Kabushiki Kaisha

Yasushi Kaneda

Koh Ishizuka

Satoshi Ishii

Hiroshi Kondo

Ko Ishizuka

Hidejiro Kadowaki

Shigeki Kato

Sakae Horyu

Takayuki Kadoshima

Kou Ishizuka

Kenji Hisamoto

Tetsuharu Nishimura

Kosuke Asano

Taisuke Isano

Makoto Takamiya

Hikaru Hoshi

A method for manufacturing a three-dimensional structure includes forming a first structure having a relief pattern on a substrate, forming a sacrifice layer on the first structure such that the sacrifice layer can be filled in a concave part of the first structure and the sacrifice layer can cover a surface of a convex part of the first structure on a side opposite to the substrate, forming a second structure having a relief pattern on the sacrifice layer, and a fourth step of removing the sacrifice layer from between the first structure and the second structure, and thereby bringing the second structure into contact with the surface of the first structure.

Manufacturing method of three-dimensional structure

A polarizer of the present invention having a higher level of polarization performance for a light in the deep ultraviolet wavelength range includes: a substrate transparent to deep ultraviolet light; and a periodic structure including a plurality of structural elements at predetermined intervals on the substrate, the polarizer being configured so that the deep ultraviolet light incident thereon is split into a light component reflected by the periodic structure and a light component passing between the structural elements adjacent to each other, and the periodic structure being composed of chromium oxide or tungsten.

Polarizer

Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them. The wave fronts of the linearly polarized light beams are superposed one upon the others. A light dividing member divides the light beams superposed one upon the other by the optical system into a plurality of light beams. A polarizing plate takes out each light beam with a 45&#xb0; polarized component, and a plurality of light receiving elements individually receive the light beams taken out by the polarizing plate.

Interference measuring apparatus for detecting a plurality of stable phase difference signals

Interference measuring apparatus for detecting a plurality of different interference phase signals. The apparatus has a light dividing member for dividing linearly polarized light beams superposed one upon another into a plurality of light beams. The apparatus also includes a light transmitting member with a plurality of light passing portions having different light transmitting properties in conformity with the incidence positions of the plurality of light beams divided by the light dividing member. In addition, the apparatus has a polarizing plate to receive the plurality of light beams that passed through the light transmitting member.

Compact interference measuring apparatus for detecting the magnitude and direction of positional deviation

A beam splitting element having a diffraction grating is designed by careful selection of device parameters such as grating period, duty cycle, depth and refractive index. In particular, the parameters are selected in such a way that the product of refractive index, depth and duty cycle is equal to or bigger than a predetermined value. The diffraction grating device designed by these rules exhibits a high diffraction efficiency and small polarization dependence.

Polarization insensitive beam splitting grating and apparatus using it

An optical type encoder includes a light-emitting element, a scale, a light receiving element for detecting light from the scale when a light beam from the light-emitting element is projected onto the scale, an incremental signal resulting from displacement of the scale being obtained by detection by the light receiving element, two or more mark portions for producing an origin signal formed on the scale, and an origin detecting system for detecting the mark portions for producing the origin signal. The rising position or the falling position of at least one pulse signal indicative of the origin is determined by the detection signals of the two or more mark portions for producing the origin signal by the origin detecting system.

Encoder

An interference measuring apparatus has an optical system for dividing a coherent light beam into two light beams, causing the divided two light beams to pass along discrete optical paths and making them into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them, and again superposing the wave fronts of the linearly polarized light beams one upon the other, a light dividing member for dividing the light beams superposed one upon the other by the optical system into a plurality of light beams, a rock crystal plate formed with a predetermined level difference in conformity with the incidence positions of the plurality of light beams, a polarizing plate for taking out each light beam transmitted through the rock crystal plate with a 45&deg; polarized component, and a plurality of light receiving elements for individually receiving the light beams taken out by the polarizing plate, a plurality of different interference phase signals being provided by the reception of lights of the light receiving elements.

Optical element used in compact interference measuring apparatus detecting plurality of phase difference signals

An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interference optical system for condensing a light beam on the surface to be detected, and making the reflected light from the surface to be detected interfere with the condensed light beam to thereby form an interference light beam, light receiving means for receiving the interference light beam and outputting bright and dark signals attributable to the relative displacement of the surface to be detected, and condensed light information supplying means for separating part of the reflected light from the surface to be detected from the optical path until the reflected light arrives at said light receiving means, and utilizing the separated light beam to detect the condensed state of the incident light beam onto the surface to be detected or make the condensed state observable.

Displacement detecting apparatus and information recording apparatus

An interferometer has a semiconductor laser which oscillates in multiple modes, an optical member for providing a beam from the semiconductor laser with a substantial optical path difference between optical paths partially in one beam, and an interference optical system for causing interference, using the beam having traveled via the optical member.

Interferometer which divides light beams into a plurality of beams with different optical paths

An apparatus for detecting the displacement information of an object has a light source, a diffraction grating for diffracting a light beam from the light source so that the light beam diffracted by the diffraction grating is incident on the object, and a photodetector for detecting the light from the object caused upon the incidence of the light beam thereon by the diffraction grating. Information regarding the relative displacement to the object along a predetermined direction is detected on the basis of a light detection signal from the photodetector. The diffraction grating is formed so that the light beam applied to the object may be condensed on the object in a direction in which the relative displacement to the object cannot be detected by the signal from the photodetector.

Displacement information measuring apparatus with hyperbolic diffraction grating

An optical displacement detecting apparatus is provided for detecting information on a relative displacement with respect to an object having a diffraction grating. The apparatus includes a light-emitting element for emitting a diverging light beam, a ball lens for converting the diverging light beam from the light-emitting element into a nearly collimated beam, a grating interference optical system for using the light beam from the ball lens to finally form interference light in such a form that two diffracted light beams from the diffraction grating are coupled, and a light detecting element for detecting the interference light from the grating interference optical system, wherein the relative displacement information with respect to the object is attained from a periodic signal from the light detecting element.

Optical displacement measuring apparatus including a light-emitting

A scale, which is provided for use with a displacement sensor, has a high degree of freedom and is capable of being manufactured at a low cost. The scale includes a graduation section and a base board which is formed separately from the graduation section and which is bonded to the graduation section. By bonding a graduation section to a separate base board, a single graduation section can be used for scales of varying lengths. Sufficient rigidity is provided by bonding a separate base board to the graduation section.

Scale for use with a displacement sensor

An optical type sensor has a light emitting element, a light receiving element, at least one optical element acting on a light beam emitted from the light emitting element, in an optical path till the light beam enters the light receiving element, and a spacer member disposed to define a spacing between the light emitting element and/or the light receiving element and the at least one optical element, the spacer member having a structure for being mounted to other member.

Optical type sensor for use as an optical measuring head or optical

A displacement detection apparatus includes a light source (1), a first diffraction grating (G1) which is arranged on the same substrate as a second diffraction grating (G2) so as to diffract and split light emitted from the light source and to irradiate .+-.1st-order diffracted light beams onto the second diffraction grating (G2), a third diffraction grating (G3) for synthesizing a +1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating, and a -1st-order reflectively diffracted light beam generated by reflectively diffracting the +1st-order diffracted light beam by the second diffraction grating to form interference light, and a light-receiving element (3) for converting the interference light into a signal representing a displacement of the substrate.

Apparatus for optically detecting displacement of an object using a

An apparatus for optically detecting information relating to the relative displacement of an object on which a diffraction grating, arranged in two axial directions with a predetermined pitch. The apparatus includes a light-emitting device configured to emit a light beam, and a first optical element configured to divide the light beam from the light-emitting device into a plurality of light beams directed in each of the two axial directions to the diffraction grating on the object which produces a plurality of diffracted light beams for each of the two axial directions. The apparatus also includes a second optical element positioned and configured to receive and combine a plurality of diffracted light beams for each of the two axial directions from the diffraction grating on the object, and a plurality of detection units, each configured to receive and detect the combined plurality of diffracted light beams for one of the two axial directions, thereby detecting information relating to the relative displacement of the object in each of the two axial directions.

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Tokyo, Japan

Yasushi Kaneda