Asahi Kogaku Kogyo K.k.

Hitachi, Ltd.

Tdk Corporation

Asahi Kogaku Kogyo Kabushiki Kaisha

Soft Energy Co., Ltd.

Yasushi Ikeda

Akira Morimoto

Satoru Tachihara

Yuji Matsui

Takashi Okuyama

Masatoshi Iwama

Hideyuki Morita

Tamihiro Miyoshi

Hidetaka Yamaguchi

Toshitaka Yoshimura

Akira Ohwaki

Mitsuo Kakimoto

Michio Ohshima

Jun Nonaka

Hiroaki Andoh

Hidenori Akatoki

Ayumi Hayakawa

Kazuya Kousaka

Toshimasa Takahashi

Osamu Saito

Kazuko Iwano

Hiroaki Andon

Jun Nonoka

Atsushi Kisuki

Yoshihisa Hayashi

Nobuyuki Ono

A management system coupled to an operation target system including one or more operation target apparatuses creates or edits a service template for operation automation, the service template being associated with one or more components. A processor (1) receives a version upgrade request that designates a service template; and (2) causes a version of a target component associated with the designated service template or a copy of the designated service template to be different from a version of a target component already associated with the designated service template, in response to the version upgrade request.

Management system for creating service

An anechoic chamber has a structure in which a dielectric plate is interposed between an electromagnetic shielding metal plate provided on an interior surface of the chamber and ferrite tiles serving as wave absorbing members, such that the ferrite tiles are located on an interior-side surface of the chamber. Screws serving as metal fittings are secured onto the electromagnetic shielding metal plate, and the dielectric plate is reliably attached to the metal plate by making use of the screws. Alternatively, the dielectric plates are attached to the steel sheet by means of adhesive such that the dimensions of each dielectric plate is made sufficiently smaller than those of a fixed size.

Anechoic chamber and wave absorber

A scanning pattern drawing apparatus which scans the surface of a workpiece with a light beam so that a pattern is described on the workpiece with the issued light beam being controlled on the basis of pattern drawing data stored in a pattern memory, wherein the pattern drawing apparatus is able to read many pieces of data in a short period of time even if the frequency of the timing pulses is reduced and which therefore is capable of drawing a precise pattern on a workpiece. A scanning pulse generator produces as scanning pulse in response to a predetermined amount of scanning with the light beam. The scanning pulse is converted to a plurality of resulting timing pulses, and successive parallel outputs of the timing pulses are produced after delaying by a predetermined time. The pattern drawing data is read from the pattern memory in response to the delayed timing pulses.

Scanning pattern drawing apparatus

A drawing surface adjusting mechanism suitable for use with a large scanning pattern drawing apparatus in which a scanning optical system scans drawing rays of light along scanning lines on a workpiece on a drawing board. A plurality of light-emitting units project rays of light in a wavelength region outside a sensitivity range of the workpiece onto a drawing surface of the workpiece in such a way that the rays substantially converge at more than one point along a scanning line of the drawing rays of light, preferably at center and end points along the scanning line. A plurality of condenser lenses are provided for focusing beams of light from the plural light-emitting units after the beams have been reflected by the drawing surface. A plurality of light-detecting elements are disposed at points of condensation by respective ones of the condenser lenses to produce output signals representing differences in condensation points that occur as the lenses depart from or approach the drawing surface. A drive unit effects relative displacement between the scanning optical system and the drawing board in response to the outputs from the light-detecting elements.

Drawing surface adjusting mechanism for scanning pattern drawing

An apparatus for correcting a scranning beam produced by a polygonal mirror tilting in small surface segments in each mirror surface segment caused by uneven mirror surfaces of the polygonal mirror. Data indicative of the amount of tilting in each of the surface segments is stored in a memory, which is addressed by a data signal indicative of the present scanning position of the polygonal mirror. Output data from the memory is applied to an acousto-optical modulator disposed in the beam path between the light source and the polygonal mirror.

Apparatus for correcting scanning beams on basis of tilting of surface

A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance.

Monitor mechanism for use with a scanning optical apparatus with

A drawing surface adjusting mechanism for use with a scanning pattern drawing apparatus capable of not only moving a drawing board in a vertical direction but also tilting it, whereby the chance of bringing the drawing surface within the depth of focus of a scanning lens is increased even if the drawing surface has waviness or other flaws within the width of a single storke of scanning. The drawing surface adjusting mechanism of the invention includes a drawing board for supporting a workpiece that is to be scanned with a scanning optical system by means of a unidirectionally tracing light beam, transport means for allowing the drawing board and the scanning optical system to slide relative to each other in a direction that crosses the direction of beam tracing at right angles, a first and a second drive mechanism which are spaced apart in the tracing direction and which move one side of the drawing board in a direction parallel to the direction of the beam, tilt control means for inclining the drawing board with respect to the transport means by making the drive amount of the first drive means different from that of the second drive means, and translation control means for effecting a translational movement of the drawing board with respect to the transport means by making the drive amount of the first drive means equal to that of the second drive means.

Drawing surface adjusting mechanism for use with scanning pattern

A table assembly that is simple in construction and which yet resists yawing in an effective way and is adapted for use with a scanning pattern drawing apparatus which involves continuous movements of the table. The inventive table assembly includes a master table that is slidable in one direction with respect to a fixed portion of the overall assembly and to which a drive force for causing the table to slide in the one direction is transmitted directly, and a working table that is slidable in the one direction with respect to the fixed portion and which is linked to the master table by connecting means having rigidity in the one direction and elasticity in a direction perpendicular to the one direction.

Table assembly for pattern drawing apparatus

A single-legged chair comprising a support post and a seat mounted on the support post at a predetermined position thereof so as to constitute a leg portion by a lower part of the support post below the seat, the general plane of the seat lying at an angle of 70.degree. to 85.degree. with respect to the support post at least when the chair is in use. In use, the seat lies virtually horizontally as the leg portion stands on the ground or floor in an inclined posture.

Single-legged chair

Growing community of inventors

Tokyo, Japan

Yasushi Ikeda