Konishiroku Photo Industry Co., Ltd.

Yasuo Morohoshi

Hiroyuki Nomori

Hiroyuki Moriguchi

Akira Nishiwaki

Kunio Ito

Masanori Matsumoto

Hitoshi Mitake

A vapor source-holding container has an opening smaller than the evaporating area of the material held in the container and a wall portion in contact with the material and having an emissivity lower than the external surface of the wall portion not in contact with the material.

Vapor source holding container

An evaporation source designed so that two or more materials to be evaporated are heated to evaporate by respective heaters, as well as method of using such an evaporation source are disclosed. The evaporation source further includes means for detecting the temperature of the slowly evaporating material and means for controlling the heaters on the basis of the detected temperature. The method of using this evaporation source comprises controlling the temperature of the slowly evaporating material in order to control the temperature of the evaporation source in such a manner that the respective materials are simultaneously heated to evaporate and deposit a film on a substrate.

Method of using an evaporation source

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Hachioji, Japan

Yasuo Morohoshi