Konica Corporation

Yasuo Morohoshi

Akira Nishiwaki

Kazuhiro Fukuda

Yoshikazu Kondo

Kiyoshi Oishi

Yoshiro Toda

A layer formation method is disclosed which comprises supplying gas to a discharge space, exciting the supplied gas at atmospheric pressure or at approximately atmospheric pressure by applying a high frequency electric field across the discharge space, and exposing a substrate to the excited gas, wherein the high frequency electric field is an electric field in which a first high frequency electric field and a second high frequency electric field are superposed, frequency &#x3c9;of the second high frequency electric field is higher than frequency &#x3c9;of the first high frequency electric field, strength Vof the first high frequency electric field, strength Vof the second high frequency electric field and strength IV of discharge starting electric field satisfy relationship V&#x2267;IV&#x3e;Vor V&#x3e;IV&#x2267;V, and power density of the second high frequency electric field is not less than 1 W/cm.

Layer formation method, and substrate with a layer formed by the method

A layer formation method is disclosed which comprises supplying gas to a discharge space, exciting the supplied gas at atmospheric pressure or at approximately atmospheric pressure by applying a high frequency electric field across the discharge space, and exposing a substrate to the excited gas, wherein the high frequency electric field is an electric field in which a first high frequency electric field and a second high frequency electric field are superposed, frequency &ohgr; of the second high frequency electric field is higher than frequency &ohgr; of the first high frequency electric field, strength V of the first high frequency electric field, strength V of the second high frequency electric field and strength IV of discharge starting electric field satisfy relationship V &gE;IV>V or V >IV&gE;V , and power density of the second high frequency electric field is not less than 1 W/cm .

A method of producing fine particles of a material by evaporating the material into an inert gas. The material is evaporated in a evaporation vessel and the fine particles are generated by cooling the evaporated material with the inert gas blown into the evaporated material from the evaporation vessel. The flow of the fine particles is restricted within a path from the evaporation vessel toward a deposit holding body by means of a scatter preventing wall around the path. The fine particles are deposited on the surface of the evaporation vessel and then receovered.

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Hino, Japan

Yasuo Morohoshi