Hitachi, Ltd.

Nippon Telegraph and Telephone Public Corporation

Yasuo Kato

Yoshio Watanabe

Seiichi Murayama

Tetsuo Ono

Shigeo Mikoshiba

Hiromitsu Matsuno

Masahide Okumura

Susumu Ozasa

Hideo Todokoro

Kunio Harada

Hisatake Yokouchi

Akio Kumada

Teruichi Tomura

Yoshio Sakitani

Tsutomu Komoda

Tadahito Matsuda

Genya Matsuoka

Minpei Fujinami

Isao Ochiai

Satoshi Ido

Tsuneo Okubo

Yoshio Furuhata

Shigeo Kubota

Zenmon Abe

A plasma X-ray source in which a discharge tube containing a pair of coaxial cylindrical electrodes is filled with a gas, a high voltage pulse from a charged capacitor is applied between the cylindrical electrodes to convert the gas into a plasma, the plasma is focused on a position near the end of the inner one of the cylindrical electrodes to generate X-rays, and the X-rays thus generated are emitted to the outside of the discharge tube through a window provided thereon, is disclosed. In the above X-ray source, the high voltage pulse is applied between the cylindrical electrodes so that the inner cylindrical electrode is at a negative potential with respect to the outer cylindrical electrode.

Plasma X-ray source

A plasma X-ray source comprises inner and outer cylindrical electrodes disposed coaxially and with a certain distance with respect to each other, an electrical insulator disposed between end portions of the inner and outer cylindrical electrodes, and a discharge vessel disposed to envelop the inner and outer cylindrical electrodes. A pulse voltage is applied between the inner and outer cylindrical electrodes to produce plasma in the discharge vessel. An electrically conductive spherical shield is disposed to envelop a space where the plasma is pinched, and the spherical shield is maintained at a potential equal to that applied to the outer cylindrical electrode.

Plasma x-ray source

A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.

Low-pressure mercury vapor discharge lamp

A plasma X-ray source is operable, like the plasma focus type source, to generate impulse discharge through a gas filled in a discharge tube. A relatively small amount of the gas is continuously supplied to and evacuated from the discharge tube in accordance with an occurrence frequency of discharge, without operating evacuation and filling of the gas at each cycle of discharge, under the regulation to make constant the pressure within the discharge tube, thereby eliminating the time for exchange of gas contaminated by discharge, reducing the amount of gas used, and improving reproducibility of discharge.

A position detecting system suitable for the position control of the surface of a workpiece mounted in an electron beam exposure system is disclosed which includes an electrically-driven light source, a first optical system for focusing a light beam from the light source on a workpiece, a position-controlling table for mounting thereon the workpiece, a second optical system for focusing light reflected from the workpiece on a predetermined image surface, a photodetector having a light receiving surface arranged on the image surface, and a negative feedback amplifier for controlling the light source by the output of the photodetector.

Position detecting system

A low-pressure mercury vapor discharge lamp comprising an envelope forming a gas-tight closed space and a pair of inner tubes provided in the closed space and having an end thereof sealed at the first end of the outer envelope, the other end thereof being opened into the closed space, and electrodes provided at the sealed end sides in the inner tubes. The temperature of the coldest spot of the envelope is in a range between 45.degree. C. and 65.degree. C. at an ambient temperature of 25.degree. C.

In an electron beam control system wherein manual adjusting means is used for adjusting currents to flow through two deflection coils which serve to deflect an electron beam in directions of two, x and y axes, respectively; an electron beam control system wherein the manual adjusting means comprises a joy stick type variable resistor which can simultaneously deliver coil deflection signal components in the directions of the two axes through a single operation, and the signal components from the variable resistor are applied to the corresponding deflection coils as adjusting currents.

Electron beam control system

A method of measuring the diameter of an electron beam in which the electron beam diameter is measured from the leading edge or trailing edge of a detector signal that is obtained as the mark area formed on the specimen is scanned by the electron beam. This method comprises the following steps: scanning the specimen by the electron beam at least once to find the maximum and minimum values of the detector signal; setting two threshold levels based on the maximum and minimum values; scanning the mark area by the electron beam to measure the time interval during which the level of the detector signal is within the two threshold levels; and calculating the beam diameter.

Method and system for measuring the diameter of an electron beam

In an electro-optical light shutter device using a solid-solution ceramic material for alternate transmission and interception of light, a first voltage is applied to the solid-solution ceramic material in the operating (open) position of the shutter, and a second voltage of polarity opposite to that of the first voltage and having an absolute value smaller than that of the first voltage is applied to the solid-solution ceramic material in the non-operating (closed) position of the shutter. The solid-solution ceramic material has a composition in which a ferroelectric phase and a non-ferroelectric phase adjoin each other through a morphotropic phase boundary.

Electro-optical light shutter device

Apparatus wherein an identical field of view of an object to-be-observed is imaged in two directions different from each other and wherein the image in one of the directions and the image in the other direction are reproduced and displayed as a left eye image and a right eye image respectively, thereby to perform the stereoscopic version of the object to-be-observed, comprising means to indicate one mark on each of the left eye image and the right eye image, and means to move both the marks to any desired positions on the respective images. The mark moving means has the function of interlockingly moving both the marks by equal distances in the same direction on the respective images, and the function of singly moving only the mark on one of the images as the position of the mark on the other image is kept fixed, and it is provided with means to control the change-over between the interlockingly moving state and the singly moving state. In moving the marks to points on the respective images as correspond to desired points on the object to-be-observed, both the marks may be interlockingly moved until the mark on the other image arrives at the desired point, and subsequently, with the mark position on the other image kept fixed, only the mark on the one image may be singly moved to the desired point.

Stereoscopic image observing apparatus

Apparatus capable of tridimensionally measuring the distance between two arbitrary points on the surface of a sample is disclosed. In apparatus wherein the surface of the sample to be observed is scanned with an energized beam, wherein a secondary radiation emitted from the sample is detected and wherein a sample image is displayed by making the detected signal a video signal, two sample images obtained by changing-over the incident angle of the beam on the sample surface are displayed, whereby the stereoscopic viewing of the sample surface is enabled. In this invention, there is added means for superposing and displaying marks at two positions of both the sample images as correspond to two arbitrary points on the sample surface and for automatically calculating the tridimensional distance between the two points on the sample surface on the basis of positioning signals of the marks.

Stereoscopic measuring apparatus

A method of manufacturing large ferroelectric crystals having desirable uniform characteristics throughout the crystal from heterogeneous ferroelectric crystals in which only natural faces having the lowest surface energy are allowed to grow while preventing other faces from growing, or the heterogeneous ferroelectric crystals are subjected to a heat treatment so that the entire crystal comes to have the desirable characteristics.

Growing community of inventors

Zama, Japan

Yasuo Kato