Kabushiki Kaisha Komatsu Seisakusho

Arms Komatsu Ltd.

Yasuo Itakura

Osamu Wakabayashi

Masahiko Kowaka

Koichi Kajiyama

Kaoru Saito

Fumika Yoshida

Yasuhiro Nozue

Tadayoshi Yamaguchi

Yoshino Amada

A casing for a laser device in which contaminants do not generate even if it is radiated with laser light, a production method and a cleaning method of the same are provided. For this purpose, the cleaning method is a method of cleaning a casing ( ) for an ultraviolet laser device, an inside of which laser light ( ) passes through, comprises the steps of purging the inside of the casing ( ) with an inert gas, and radiating F2 cleaning laser light ( ) oscillated from an F2 molecular laser light radiating device ( ) to the inside of the casing ( ) to thereby remove contaminants adhering to the inside of the casing ( ).

Casing for laser device, production method and cleaning method of the same

A laser wavelength controlling apparatus adapted for controlling the wavelength of a narrow-band oscillation laser beam at a high accuracy for long period of time even if environmental conditions such as the atmospheric temperature and pressure changes to some degree. This wavelength controlling apparatus includes a wavelength selective element (2) for narrowing the band width of the oscillating laser beam; a wavelength selection controller 9 and a wavelength selective element driver for changing the wavelength to be selected by the wavelength selective element (2); a reference light source (7) for generating a reference light for measuring the wavelength of the oscillating laser beam; a wavelength detector (8) for leading said oscillating laser beam and said reference light into a spectroscope and detecting the absolute wavelength of said oscillating laser beam on the basis of the detected value of the reference light; and a wavelength detecting driver (8a) for controlling the wavelength to be selected by said wavelength selective element in cooperation with said wavelength controller (9) so as to correspond the absolute wavelength detected by the wavelength detector with the preset wavelength.

Laser wavelength controlling apparatus

Method and apparatus for sensing the wavelength of a laser beam

A reduced projection light source comprises a laser device for emitting laser light having a transverse mode of multimodes, and an etalon located between a chamber of the laser device and a total reflection mirror. The light source is used as an exposure light source for transfer printing an ultrafine pattern on a semiconductor wafer.

Light source for reduced projection

Growing community of inventors

Hiratsuka, Japan

Yasuo Itakura