Sharp Kabushiki Kaisha Corporation

Other

Yasunori Nishimura

Taimi Oketani

Tsuyoshi Naraki

Tadanori Hishida

Eiichi Takahashi

Exposure method

Exposure apparatus

A liquid crystal display device includes: an array substrate; a counter substrate facing the array substrate; and a liquid crystal layer interposed between the array substrate and the counter substrate, wherein the array substrate includes: a plurality of pixel electrodes arranged in a matrix in a display region; a plurality of gate lines; a plurality of source lines which cross the plurality of gate lines; an insulating layer provided between the plurality of gate lines and the plurality of source lines; a plurality of switching elements respectively connected to respective ones of the plurality of the gate lines, the plurality of source lines, and the plurality of pixel electrodes; and a short ring, a plurality of first inspection signal voltage input terminals and a plurality of depletion-type thin film transistors (DTFT) provided in a peripheral region adjacent the display region, and wherein each of the plurality of gate lines and the plurality of source lines is connected to the short ring via respective ones of the plurality of first inspection signal voltage input terminals and respective ones of the plurality of depletion-type thin film transistors, and the plurality of depletion-type thin film transistors is located between the short ring and the plurality of first inspection signal voltage input terminals, the plurality of depletion-type thin film transistors control electrical conduction between the short ring and the plurality of gate lines and source lines.

Liquid crystal display device having DTFTs connected to a short ring

In order to effectively detect unwanted residual organic compounds such as photoresist pieces left on a semiconductor substrate after a photolithography step during its fabrication process, the substrate surface is irradiated by an ultraviolet light beam and the fluorescent light emitted by the residual organic compounds is detected by a light-receiving element and converted into an electrical signal.

Apparatus and method for detecting residual organic compounds

Growing community of inventors

Nara, Japan

Yasunori Nishimura