Murata Manufacturing Co., Ltd.

Murata Manufacturingco., Ltd.

Yasunobu Hayashi

Takashi Yamane

Nobuhiro Ishida

Sunao Yamazaki

An acoustic wave device includes a piezoelectric substrate and an electrode on the piezoelectric substrate and including first and second layers. The first layer includes Al and Cu. The second layer is on a side opposite to a piezoelectric substrate side of the first layer and includes Al. The first layer includes an Al crystal and at least a portion of CuAlcrystal grains that are provided in a direction orthogonal or substantially orthogonal to a thickness direction of the piezoelectric substrate. In the electrode, the CuAlcrystal grains do not extend to the main surface of the second layer on a side opposite to a first layer side.

Acoustic wave device

An acoustic wave device includes a support substrate, a piezoelectric layer on the support substrate, and a functional element on the piezoelectric layer. The support substrate and the piezoelectric layer each have a rectangular or substantially rectangular shape in plan view from a direction normal to the support substrate. At least one corner portion of the piezoelectric layer has a curved shape or a polygonal shape.

An acoustic wave device includes a piezoelectric layer and an interdigital transducer disposed on the piezoelectric layer. The interdigital transducer primarily includes Al and includes an additive selected from a group consisting of Nd, Sc, and Ta, and a concentration of the additive in a region opposite to a piezoelectric-layer-side region of the interdigital transducer is higher than a concentration of the additive in the piezoelectric-layer-side region of the interdigital transducer.

An elastic wave device includes a spacer layer on or above a support substrate and outside a piezoelectric film as seen in a plan view from a thickness direction of the support substrate. A cover layer is disposed on the spacer layer. A through electrode extends through the spacer layer and the cover layer and is electrically connected to the wiring electrode. The wiring electrode includes a first section overlapping the through electrode as seen in the plan view from the thickness direction, a second section overlapping the piezoelectric film as seen in the plan view from the thickness direction, and a step portion defining a step in the thickness direction between the first section and the second section. The spacer layer includes an end portion embedded in the cover layer.

Elastic wave device

An electronic component that includes a substrate having a first main surface and a second main surface, an element on the first main surface of the substrate, a first contact electrode electrically connected to the element, an insulating film defining a first opening at a position that has an overlap with the first contact electrode in the plan view of the first main surface, a protective film covering the insulating film in a region including at least a part of the periphery of the first opening, and a first external electrode electrically connected to the first contact electrode and extending over the protective film.

Growing community of inventors

Nagaokakyo, Japan

Yasunobu Hayashi