Socionext Inc.

Yasumitsu Sakai

Shinichi Moriwaki

A layout structure of a ROM cell using a complementary FET (CFET) is provided. The ROM cell includes first and second three-dimensional transistors. The second transistor is formed above the first transistor, and the channel portions of the first and second transistors overlap each other. First data is stored in the ROM cell depending on the presence or absence of connection between a local interconnect connected to the source of the first transistor and a ground power supply line, and second data is stored in the ROM cell depending on the presence or absence of connection between a local interconnect connected to the source of the second transistor and a ground power supply line.

Semiconductor storage device

In a semiconductor storage device, a first ROM cell includes a first nanosheet FET having a first nanosheet as the channel region, provided between a first bit line and a first ground power supply line. A second ROM cell includes a second nanosheet FET having a second nanosheet as the channel region, provided between a second bit line and a second ground power supply line. The face of the first nanosheet closer to the second nanosheet in the X direction is exposed from a first gate interconnect, and the face of the second nanosheet closer to the first nanosheet in the X direction is exposed from a second gate interconnect.

Semiconductor storage device having rom cells including nanosheet field effect transistors

A ROM cell includes first and second three-dimensional transistors. The second transistor is formed above the first transistor, and the channel portions of the first and second transistors overlap each other. First data is stored depending on whether first and second local interconnects connected to the nodes of the first transistor are connected to a same line, or different lines, out of a bit line and a ground power supply line. Second data is stored depending on whether third and fourth local interconnects connected to the nodes of the second transistor are connected to a same line, or different lines, out of a bit line and a ground power supply line.

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Kanagawa, Japan

Yasumitsu Sakai