Sinfonia Technology Co., Ltd.

Tokyo Electron Limited

Yasumichi Mieno

Yuji Urabe

Satoru Kawakami

Yasuhiro Tobe

Yosuke Muraguchi

Yoji Masui

Yasuyoshi Kitazawa

Manabu Funato

Hiroki Wakabayashi

Toshio Kamigaki

Shinji Matsubayashi

Toru Saeki

Takeshi Yabe

An arm unit of a transfer robot includes an R-axis motor configured to relatively rotate a second arm with respect to a first arm. The R-axis motor is fixed to the first arm so as to protrude to below an arm axis holding portion of the first arm with an output shaft thereof facing upward. The output shaft is configured to penetrate the first arm from below. The output shaft is fixed to the second arm by a shaft fixing portion.

Transfer robot

A robot arm apparatus includes an arm mechanism including a base member and a link pivotally connected to the base member for pivotal motion in a horizontal plane through a rotational shaft. The link holds a regular circular transport object at its distal end. The apparatus also includes an edge detector, provided on the base member, that detects two edges of the regular circular transport object as the link pivotally rotates with respect to the base member, a pivotal angle detector that detects a pivotal angle of the link with respect to the base member, and a center position calculator that calculates a center position of the regular circular transport object with respect to the link. The calculation is based on two pivotal angles detected by the pivotal angle detector when the edge detector detects the two edges of the regular circular transport object.

Robot arm apparatus

A clamping device comprising: a distal end side stationary blocks which are provided on a side of a distal end of a workpiece retaining base, and in which stationary tilt faces tilting downwardly to a central direction of the workpiece are formed; a proximal end side stationary blocks which are provided on a side of a proximal end of the workpiece retaining base, and in which upward stationary tilt faces tilting downward toward the central direction of the workpiece are formed; and a movable block which is arranged at a position proximal to the proximal end side stationary blocks, and is capable of advancing to or retracting from a side of the distal end side stationary blocks with the workpiece being held between the blocks, and in which a downward movable tilt face tilting upwardly toward the central direction of the workpiece is formed.

Clamping device and workpiece conveying robot

An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section () of which inside is held in vacuum, a placing section () that is disposed inside the vacuum section () and is capable of placing a workpiece thereon, a linear motor) that includes coils () and makes the placing section () travel within the vacuum section, wherein air is placed inside the placing section () while being isolated from the vacuum section (), and the coils () of the linear motor () are disposed inside the placing section ().

Vacuum processing apparatus

Growing community of inventors

Minato-ku, Japan

Yasumichi Mieno