Fujikin Inc.

Yasumasa Yanagida

Tadayuki Yakushijin

Michio Yamaji

Tsuyoshi Tanikawa

Keisuke Ishibashi

Tomohiro Nakata

Koji Hiramatsu

Takashi Funakoshi

Kunihiko Daido

Provided is a valve for high-pressure gas, wherein a sheet member is provided inside a through hole formed in a valve body of the valve, wherein the sheet member constitutes a channel for high-pressure gas inside the through hole, wherein the sheet member is fixed inside the through hole by a pressing member, wherein an end opening of the through hole is closed by a lid member, wherein a gasket is provided at a peripheral part of the end opening of the through hole, wherein the gasket is sandwiched between the lid member and the valve body, wherein the lid member is pressed toward the valve body by a plug, and wherein a bearing is provided between the plug and the lid member.

Valve

Provided are a seal structure in which sealing performance is ensured over a long period of time even when it is used for low-temperature fluids, a sealing method, and a coupling including the seal structure. The seal structure includes an annular gasket interposed between a first member and a second member. The first member is provided on its surface facing the gasket with: a first surface located on the inner diameter side; a first annular protrusion located on the outer diameter side of the first surface; a second surface located on the outer diameter side of the first protrusion; a second annular protrusion located on the outer diameter side of the second surface and having a greater protruding amount with respect to the second surface than that of the first protrusion; and a third surface located on the outer diameter side of the second protrusion.

Seal structure, sealing method, and coupling equipped with said seal structure

Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting meanswhich sets an upper limit value of a vertical movement amount of a stemassociated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment meanswhich changes the vertical movement amount of the stemassociated with the opening and closing operations, within a range of not greater than the upper limit value.

Fluid controller

Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment meansis provided with: a handlewhich has a female screwon an inner periphery thereof and which is rotatably supported by a casing; a movable bodyin which a male screwis provided on an outer periphery thereof and is screwed into the inner periphery of the handle; and a guide meanswhich prevents rotation of the movable bodyrelative to the casingand which enables vertical movement of the movable body

A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stemunder the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Vacuum valve

A fluid controller includes an automatic opening-and-closing device configured to move a valve rod upward and downward, and a manual opening-and-closing device configured to move the valve rod upward and downward by a manual operation. The manual opening-and-closing device includes a cylindrical handle supported by a casing so as to be rotatable and not to move upward and downward, and a cylindrical operating member screwed into a female screw of the handle and configured to move upward and downward with a rotation of the handle. The operating member is apart from a piston of the automatic opening-and-closing device in a vertical direction in an automatic operation. The piston is moved by the operating member which moves upward in association with the rotating operation of the handle in a manual operation in an opposite direction from the opening state brought by the automatic opening-and-closing device.

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Osaka, Japan

Yasumasa Yanagida