Fujitsu Corporation

Fujitsu Semiconductor Limited

Yasukazu Ono

Koji Okada

Hiroyuki Matsunami

Motoharu Yakura

To provide a control method and a control program of a prober that are capable of enhancing throughput. Chips are tested in step S. In step S, when the counted number Y of conforming chips has reached a predetermined number of conforming chips X which constitutes conditions for testing, the process advances to step S. In step S, testing of wafers taking place at that time is interrupted, and this wafer is stored in an output cassette OC. In a subsequent step S, the subsequent wafer is tested, and stored in the output cassette OC(step S). When all wafers have been tested, the process advances to step S, and testing of the lot is completed. As a result, wafers that remain untested and wafers that have been tested stored separately in the input cassette and the output cassettes.

Control method and control program for prober

A probe needle having a coaxial structure that facilitates assembly of a probe card. The probe needle is manufactured by covering a central conductive body with an insulative tube, and forming a conductive layer around the insulative tube by superimposing a film of fine conductive grains around the insulative tube.

Method for manufacturing probe needle, method for manufacturing probe card, and probe card

An object of this invention is to provide a band distribution inspecting device and band distribution inspecting method capable of carrying out inspection on whether or not a scattered oscillation signal oscillated containing a frequency variation from the fundamental frequency with the fundamental frequency as a reference point has a band distribution rapidly, with a simple way and at a cheap price. A scattered oscillation signal SSS inputted to a band distribution detecting sectionis outputted as a predetermined band pass signal SBP through a band pass filterhaving a predetermined pass band of a predetermined narrow-band width &#x394;f within a band distribution. This signal is converted to a root-mean-square value by a smoother, smoothed by a capacitor Cand transferred to a general purpose inspecting deviceas a DC signal SAV. The DC signal SAV is compared with a predetermined voltage value VX by a comparatorand its comparison result is judged by a judging sectionand then, an inspection result is outputted as a judging signal J. As a result, an edge frequency in the band distribution of the scattered oscillation signal SSS and disturbance of frequency variation within/out of the band and dullness in waveform and the like can be inspected for.

Growing community of inventors

Kasugai, Japan

Yasukazu Ono