Ngk Insulators, Inc.

Yasuho Aoki

Yoshimasa Kobayashi

Masaki Ishikawa

Naoya Takase

Shinya Yoshida

Tasuke Narishige

A semiconductor-manufacturing apparatus member includes a ceramic plate having an upper surface serving as a wafer placement surface, a plug disposed in an undersurface of the ceramic plate and including a dense body and a gas flow channel that extends through the body in a thickness direction of the body while winding, a gas outlet port that extends through the ceramic plate in a thickness direction of the ceramic plate to be connected to an upper portion of the gas flow channel, and a metal cooling plate joined to the undersurface of the ceramic plate, and including a gas supply channel through which gas is supplied from a lower portion of the gas flow channel. In the plug, at least a portion in length of the gas flow channel is formed from a porous member.

Semiconductor-manufacturing apparatus member and plug

A heater includes: a plate-like first heater substrate; an electrical heating wire that is provided on a first surface of the first heater substrate in a parallel circuit; electrodes that are connected to the electrical heating wire to allow current to flow in the electrical heating wire; and a plate-like cover substrate that covers the first surface of the first heater substrate, the electrical heating wire, and the electrodes with a second surface thereof. The electrical heating wire of the heater generates heat, so that the amount of heat is supplied. A honeycomb structure includes at least one heater that is provided so as to surround an outer wall thereof.

Heater and honeycomb structure including heater

A nozzle is mounted on an end of an ejector for ejecting an aerosol on an ejection side in a honeycomb filter production apparatus. The nozzle is formed into a shape having a longitudinal direction. A single introduction port is formed at an end surface of the nozzle on one side in the longitudinal direction, and a plurality of discharge ports are formed at an end surface of the nozzle on the other side in the longitudinal direction. A single introduction passage extends linearly from the single introduction port in the longitudinal direction. A plurality of discharge passages are each branched from an end portion of the introduction passage on a side opposite to the introduction port and extend to corresponding one of the discharge ports in a direction tilted from the longitudinal direction.

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Nagoya, Japan

Yasuho Aoki