Canon Kabushiki Kaisha

Yasuhito Sasaki

Yoshikazu Miyajima

Hitoshi Sato

Hideo Tanaka

Keiji Emoto

Naosuke Nishimura

Katsumi Asada

Toshihiko Nishida

Takeshi Nakajima

Mitsuru Seki

There is provided a projection optical system that projects an image of an object onto an image plane. The projection optical system includes an imaging optical system including a first concave mirror, a convex mirror, and a second concave mirror; an optical member having a first reflecting surface and a second reflecting surface each redirecting an optical path; and a supporting member that supports the convex mirror. The first reflecting surface, the first concave mirror, the convex mirror, the second concave mirror, and the second reflecting surface are provided in that order in a direction of travel of light from an object plane. The optical member has a through hole having an opening on a side facing the convex mirror. The supporting member extends through the through hole and from the opening to the convex mirror.

Projection optical system, exposure apparatus, and device manufacturing method

A stage device includes a base and a stage movable portion that is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other along an axial direction of the piping element, guides a bend of the at least one of the piping element and the wiring element. A plurality of heat insulating sheets are supported by the plurality of members of the auxiliary member. The plurality of heat insulating sheets are provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.

Stage device including a heat insulating sheet supported by an auxiliary member

A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.

Stage device, exposure apparatus, and microdevice manufacturing method

A plane motor device that includes a stator unit, a movable unit movable along a plane above the stator unit, first and second coil units at one or both of the movable unit and the stator unit, in which coil units a current flows for driving the coil unit, and an enclosure partitioned into a plurality of separate regions. The enclosure encloses the first and second coil units in two respective regions of the plurality of separate regions. Each of the two regions has a cooling channel through which cooling refrigerant flows separately from the cooling channel of the other region.

Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member

A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.

Stage apparatus, exposure system using the same, and device manufacturing method

A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.

Stage apparatus, exposure apparatus, and device manufacturing method

This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.

Positioning apparatus, exposure apparatus, and device manufacturing method

A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.

Stage apparatus and exposure apparatus

A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.

Growing community of inventors

Utsunomiya, Japan

Yasuhito Sasaki