Taiyo Yuden Co., Ltd.

Yasuhito Hagiwara

Fuyuki Miyazawa

Katsuhiro Oyama

Takaki Hamamoto

Isao Matsuda

A gas detection device according to an embodiment of the present invention includes a casing and a plurality of sensor elements. The casing includes a gas introducing port, a first chamber that communicates with the introducing port, a second chamber that communicates with the first chamber, a flow limiter that limits a flow of gas from the first chamber to the second chamber, and a gas exhausting portion that communicates with the second chamber. The plurality of sensor elements are disposed within the second chamber and have different detection sensitivities depending on a gas type.

Gas detection device

In one aspect, a load cell includes an elastic body, first optical unit, second optical unit, detector, and computation unit. The first optical unit has a light source, a first diffraction grating on which light from the light source is incident, and a light-receiving unit. The first optical unit is fixed to a first end portion of the elastic body and arranged within a hollow portion of the elastic body. The second optical unit has a second diffraction grating on which diffracted light from the first diffraction grating is incident to generate interference light. The second optical unit is fixed to a second end portion of the elastic body and arranged within the hollow portion. The detector detects the interference light. The computation unit computes a relative displacement amount of the second diffraction grating relative to the first diffraction grating on the basis of a signal obtained by the detector.

Load cell having a computation unit which computes displacement amount of the diffraction grating

A displacement measurement device includes: a light source; a first diffraction grating and a second diffraction grating arranged along a path of light from the light source and movable relative to one another, the first and second diffraction gratings generating diffracted light; an optical sensor that detects interference light produced by interference between &#x2212;nth order diffracted light generated as a result of the second diffraction grating diffracting +nth order diffracted light from the first diffraction grating and +nth order diffracted light generated as a result of the second diffraction grating diffracting &#x2212;nth order diffracted light from the first diffraction grating, where n is a natural number greater than or equal to 1; and a calculation unit calculating, according to a signal from the optical sensor, a relative displacement between the first and second diffraction gratings in a direction orthogonal to an optical axis of the first and second diffraction gratings.

Displacement measurement device and displacement measurement method

An optical unit includes: a first diffraction grating where light from a light source enters; a second diffraction grating that generates interference light as a result of diffracted light rays emitted from the first diffraction grating entering the second diffraction grating; and an optical member including a pair of reflective surfaces that are parallel and opposite to each other, the optical member being configured such that the pair of reflective surfaces respectively reflect &#xb1;mth-order diffracted light rays that are diffracted light rays of a specific order among a plurality of orders of the diffracted light rays emitted from the first diffraction grating so as to guide the &#xb1;mth-order diffracted light rays to the second diffraction grating, where m is a natural number.

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Tokyo, Japan

Yasuhito Hagiwara