Nuvoton Technology Corporation Japan

Yasuhisa Naito

Satoru Fujii

Zhiqiang Wei

Kazunari Homma

Shinichi Yoneda

Hiroyuki Akinaga

Hisashi Shima

A gas sensor includes: a gas-sensitive body layer disposed above a substrate and including a metal oxide layer; a first electrode on the gas-sensitive body layer; and a second electrode on the gas-sensitive body layer, being apart from the first electrode by a gap. The gas-sensitive body layer has a resistance change characteristic that reversibly transitions to a high-resistance state and a low-resistance state on basis of a voltage applied across the first electrode and the second electrode. At least a part of the gas-sensitive body layer is exposed to the gap. The gas-sensitive body layer has a resistance that decreases when gas containing a hydrogen atom is in contact with the second electrode.

Growing community of inventors

Ibaraki, Japan

Yasuhisa Naito