Daikin Industries, Ltd.

Other

Daikin Kogyo Co., Ltd.

Daiken Industries, Ltd.

Yasuhisa Furutaka

Tsunetoshi Honda

Yukio Homoto

Masayuki Yamana

Hirokazu Aoyama

Tatsuo Nakada

Shinsuke Morikawa

Akira Sekiya

Kazuhiro Shimokawa

Yoshio Iwai

Masami Iwasaki

Yorisato Hisanaga

Kunitada Tanaka

Nobuyoshi Iwashita

Sadamu Ishii

Tetsuya Takagaki

Tutomu Yoshida

Yasumichi Chiba

Souichi Ueda

Kenji Mikami

Yasuo Hibino

Tsuyoshi Takaichi

Shunichi Yamashita

Norifumi Ohtsuka

Disclosed is fluorocarbon-based dry etching gas which is free of global environmental problems and a dry etching method using a plasma gas obtained therefrom. The dry etching gas includes a fluorinated ether of carbon, fluorine, hydrogen and oxygen and having 2-6 carbon atoms.

Dry etching gas

Process for preparing perfluoroalkyl bromides

A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising chlorination of 1,1,1-trifluoro-2-chloroethane with chlorine gas in the presence or absence of a metal salt as a catalyst.

Process for production of 1,1,1-trifluoro-2,2-dichloroethane

Process for preparing fluoroalcohol

A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising chlorinationo f 1,1,1-trifluoro-2-chloroethane with chlorine gas in the presence or absence of a metal salt as a catalyst.

A process for production of 1,1,1-trifluoro-2,2-dichloroethane comprising reacting 1,1,1-trifluoro-2-chloroethane with hydrogen chloride and oxygen in the presence of a metal salt as a catalyst.

Triperfluoroalkylamines of the formula: ##STR1## wherein, Rf.sup.1 and Rf.sup.2 are each a perfluoroalkyl group having 1 to 4 carbon atoms, and Rf.sup.3 is a perfluoroalkyl group having 3 to 11 carbon atoms, have good thermal stability, good voltage resistance, good fluidity at low temperature and low surface energy and which produce no toxic perfluoroisobutene.

Triperfluoroalkylamines and preparation of the same

Process for preparing halogenated alkane

A novel fluorine-containing compound of the formula:

Fluorine-containing compounds, and their preparation and use

Process for preparing 2-trifluoro-methyl-3,3,3-trifluoropropene.

A process for preparing a trifluoromethylbenzonitrile derivative of the formula: ##STR1## wherein X is hydrogen, lower alkyl, halogenated lower alkyl, lower alkoxy, nitro, hydroxyl, amino, cyano, carboxyl or sulfon which comprises reacting trifluoromethylhalogenobenzene of the formula: ##STR2## wherein X is as defined above, and Y is halogen with copper (I) cyanide in a solvent selected from the group consisting of hexamethylphosphoric triamide, N-methylpyrrolidone and a mixture thereof in the presence of a catalyst selected from the group consisting of (A) bromine, (B) iodine, (C) a combination of bromine or iodine and metallic copper and (D) copper (II) bromide, by which process the compound (I) is prepared in a good yield, and by-products are produced in a lower yield than the conventional processes.

Process for preparing a trifluoromethylbenzene derivative

Growing community of inventors

Osaka, Japan

Yasuhisa Furutaka