Yokogawa Electric Corporation

Yasuhiro Tanibata

Yukihiko Takamatsu

Hisao Takahara

Kenta Mikuriya

Naoki Seki

Yasuhito Kosugi

Kenji Hachiya

Hideomi Negishi

A method for adjusting a confocal microscope which includes a microscope unit and a confocal scanner unit of Nipkow disk type, emits a light beam for image measurement on a sample, images a returned fluorescent light of the light beam by a CCD (charge-coupled device) digital camera as a confocal image, and enables observation of the sample by the confocal image, the method includes matching a phase of rotation of the Nipkow disk with a phase of an exposure time of the CCD digital camera.

Method for adjusting confocal microscope

The present invention provides a confocal scanning microscope whereby fluorescence observations can be made using a plurality of types of excitation light without the need for attaching and detaching a light source to and from the optical fiber. The confocal scanning microscope comprises:

Confocal scanning microscope

A particle component analyzing apparatus and method using a microwave induced plasma to perform element analysis of particles, such as particles existing in a clean room; wherein an aspirator scans a filter to draw particles collected on the filter, and using the microwaves to excite the drawn particles to cause generation of an emission spectrum having a plurality of wavelengths indicative of the elements of the particle, which are measured by a plurality of monochrometers, and converted by an optoelectric converter into electrical signals to identify the different elements in the particle. The invention uses means for obtaining the cube roots of the outputs from the optoelectric converter. By obtaining the ratio of cube root outputs corresponding to the diameters of particles preprocessed into spherical shape of a reference element and of an element to be measured, and then by obtaining the cube root of an output from an element in a measurement sample and by multiplying it by the ratio of cube roots with respect to the reference element, there is obtained an equivalent particle diameter corrected for differences in sensitivity between the elements. Means are provided for determining the composition of a particle from the emission spectrum and for calculating the composition ratios of a plurality of elements from the different emission intensities.

Particle component analyzing apparatus, and equivalent particle diameter

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Musashino, Japan

Yasuhiro Tanibata