Mitsubishi Denki Kabushiki Kaisha

Other

Agency of Industrial Science and Technology

Yasuhiro Sato

Yuki Miyamoto

Hajime Matsumoto

Takamasa Inobe

Toshiyuki Watanabe

Yasuhiro Marume

Sataro Yamaguchi

Katsuya Tsuji

Masaki Otani

Yoichi Hirano

A method of process control includes the steps of preparing recycling procedure data for each type of film formed on a wafer by diffusion processing, setting a recycle control number for controlling recycling processing based on the recycling procedure data, and outputting a recycling instruction to the recycling apparatus when the prescribed number of non-product wafers are accumulated and when an accept request is received from the recycling apparatus.

Apparatus and method for controlling semiconductor manufacturing system utilizing recycled wafers

A semiconductor manufacturing system and method includes an exposure value detector for detecting an exposure value, a pattern size detector for detecting a pattern size, a size comparator for calculating a size difference between the pattern size and a target value, an optimum exposure value calculator for calculating an optimum exposure value based on the exposure value and the size difference, an exposure value controller. In this semiconductor device manufacturing method, the optimum exposure value is calculated based on the exposure value and the size difference, and exposure is performed at the optimum exposure value. A semiconductor device is manufactured by the manufacturing method.

Semiconductor device, manufacturing method thereof and semiconductor manufacturing system

A capacitor bank comprising a plurality of capacitor units coupled in parallel, and an energy absorbing resistor Rj is inserted in series with each one Cj of the capacitor units. Thus, when a capacitor unit Cj suffers an insulation failure, the energy flowing into the failing capacitor unit Cj from the other capacitor units is absorbed substantially by the resistor Rj. The capacitor bank may comprise several serially connected rows of parallel connected capacitor units, an energy absorbing capacitor Rij being inserted in series with each one Cij of the capacitor units. Further, each capacitor unit Cj may be provided with a protective short-circuiting device Sj, which short circuits the two terminals of the capacitor unit Cj via a bypass line 9 upon an occurance of failure of the capacitor unit Cj. An oscillation preventing resistor Ry is connected in series with each capacitor unit Cj in addition to an energy absorbing resistor Rx.

Capacitor bank provided with a protective device

An apparatus designed for detecting the position of a faulty light emitting element and installed in a large screen display system which is equipped with a large screen consisting of multiple light emitting elements such as cathode-ray tubes or electric bulbs arrayed vertically and horizontally in columns and rows to display desired still images, characters or motion images, and also with a character processor and motion image processor as control means. The apparatus comprises an input means for receiving a drive command to turn on or off an arbitrary group of light emitting elements out of those constituting the large screen; a display means for displaying the content of the command fed to the input means; a character processor for converting the content of the command into a signal and outputtting the signal to a motion image processor; and the motion image processor for writing the output signal of the character processor in and reading it out from an incorporated memory, thereby continuously processing the position data designated by the input means relative to the element group to be turned on or off. Detecting the position of any faulty light emitting element can be achieved by adjusting the faulty element to attain positional coincidence with the element group to be turned on or off.

Apparatus for detecting position of faulty light emitting element in

Growing community of inventors

Hyogo, Japan

Yasuhiro Sato