Fujitsu Corporation

Yasuhiro Omori

Yoshinobu Kubota

Toshihiro Otani

Tomoyuki Itoh

Toshihiro Ohtani

Tomoyuki Ito

Tomoyuki Itou

Osamu Tsuboi

Masaharu Doi

Hiromitsu Soneda

Shinji Maruyama

Yoshihiko Yoshida

Hisashi Takamatsu

Yoshihiro Takahashi

A micro electro mechanical device includes an inner frame provided with a movable part and an outer frame provided in a circumference of the inner frame. The outer frame has a fixing part fixed by a joining material. A first torsion bar is provided between the outer frame and the inner frame so as to swingably support the inner frame on the outer frame. A first opening is formed in the outer frame in a vicinity of the first torsion bar. The first opening is positioned between the fixing part of the outer frame and the first torsion bar.

Micro electro mechanical device having an opening between a fixing portion and a torsion bar

An optical device guides propagating light to exit from a desired side surface of a substrate while maintaining sufficient power within a limited size of the substrate and which facilitates adjustment of a mount position of a light-receiving element by increasing allowable tolerance of the mount position of the light-receiving element. The optical device has a substrate, a light propagating direction path formed in the substrate, and a reflection groove formed in an output-side of said light propagating direction path in the substrate. A side wall of the reflection groove is formed to become a convex reflection surface in relation to light which enters from the light propagating direction path, and the light output from the light propagating direction path undergoes total reflection on a side wall forming the reflection surface and lets the reflected light exit from a predetermined side surface of the substrate while enlarging an image.

Optical device

An object of the invention is to provide a polarization scrambler wherein the polarization of linearly polarized signal light can be rotated to facilitate obtaining a minimum degree of polarization, and wherein scrambling operation is possible even if signal light of optional polarization states is input. Accordingly with the polarization scrambler, a polarization rotation section is provided on an input side on a chip on which is formed an optical waveguide, and a polarization scrambling section is provided on an output side. With the polarization rotation section, the polarization of linearly polarized signal light which is transmitted by the optical waveguide is rotated by means of an acousto-optic effect due to an elastic surface wave generated by an electrode, so as to become 45.degree. with respect to a vertical direction of the optical waveguide. With the polarization scrambling section, the polarization of the signal light from the polarization rotation section is scrambled in accordance with a modulation signal.

Polarizaiton scrambler

An optical waveguide module including a metal package having a bottom surface formed with a chip insertion groove, and a waveguide chip inserted and fixed in the chip insertion groove. The waveguide chip has an optical waveguide formed on a substrate having an electro-optic effect. A signal electrode is formed on the optical waveguide, and a ground electrode is formed on the substrate. The ground electrode is connected to the metal package through first and second ribbons respectively located in the vicinity of first and second bent portions of the signal electrode.

Optical waveguide module having improved high-frequency characteristics

An optical modulator for modulating light emitted from a signal light source has a substrate having electrooptic effect, an optical waveguide of a Mach-Zehnder type formed on the substrate, an electrode formed on the substrate to control light propagated in the optical waveguide, an interference light generating means for making radiation light radiated from the optical waveguide and signal light leaking from the optical waveguide interfere with each other to generate interference light, and emitting the interference light from an end surface of the substrate, a photo-detector for monitoring the interference light of the radiation light and the signal light, and a signal controlling circuit for controlling an operating point of the optical modulator according to a change of the interference light monitored by the photo-detector It is thereby possible to prevent degradation of a distinction ratio due to a shift of the operating point of the optical modulator so as to allow stable optical modulation, while facilitating a design of the mechanism of the optical modulator.

Optical modulator

An optical modulator for modulating light emitted from a signal light source has a substrate having electrooptic effect, an optical waveguide of a Mach-Zehnder type formed on the substrate, an electrode formed on the substrate to control light propagated in the optical waveguide, a light guiding unit for guiding light radiated or leaking from the optical waveguide, an interference light generating means for making light emitted from the light guiding unit and signal light leaking from the optical waveguide interfere with each other to generate interference light, and for emitting the interference light from an end surface of the substrate, a photo-detector for monitoring the interference light obtained by the interference light generating means, and a signal controlling circuit for controlling an operating point of the optical modulator according to a change of the interference light monitored by the photo-detector, thereby stably controlling the operating point of the optical modulator while facilitating a design of the mechanism.

An optical waveguide device including a package housing having an element mounting surface, an element inserting groove opening to the element mounting surface, and a cutout as a space opening to an inner surface of the element inserting groove; and an optical waveguide element having a dielectric substrate, an optical waveguide formed in a surface of the dielectric substrate, and an electrode formed over the surface of the dielectric substrate, the optical waveguide element being inserted and fixed in the element inserting groove of the package housing by using an adhesive. The cutout opens also to the element mounting surface. In applying the adhesive to the bottom surface of the element inserting groove and inserting the optical waveguide element into the element inserting groove, the adhesive flows into the cutout and is prevented from flowing up to the element mounting surface. Further, a working space for application of the adhesive to the bottom surface of the element inserting groove can be ensured by the cutout.

Optical waveguide device

Disclosed herein is an optical modulator module including an optical waveguide structure of a Mach-Zehnder type, for example, an electrode for switching a coupling mode where an output beam is obtained from the optical waveguide structure and a leakage mode where a leakage beam deflects from the optical waveguide structure, a photodetector having a photodetecting surface for receiving the leakage beam, and a mechanism for converting a beam parameter of the leakage beam so as to prevent close contact of the photodetecting surface with the optical waveguide structure. The optical modulator module allows monitoring of optical power by the use of the leakage beam and is improved in manufacturability.

Growing community of inventors

Kawasaki, Japan

Yasuhiro Omori