Ebara Corporation

Yasuhiro Niimura

Nobuharu Noji

Takeshi Kawamura

Takahiro Tanaka

Tetsuro Sugiura

Hiroaki Ogamino

Norihiko Nomura

Masami Nagayama

Hideo Arai

Harumitsu Saito

Tetsuma Ikegami

Kazuma Ito

Masaru Nakaniwa

Naoya Hanafusa

Yuji Matsuoka

Hiroshi Hattori

Noburu Shimuzu

Soichi Kudara

Wei Zhang

Kazuki Kimoto

An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

Evacuation system

A vacuum exhaust system can improve the operating efficiency of the vacuum exhaust system while reducing the system cost, to quickly attain a vacuum in the auxiliary chambers without increasing the size of the vacuum pumps. The vacuum exhaust system comprises a first pumping section and a second pumping section disposed downstream of and in series with the first pumping section. A main exhaust passage is provided to communicate a main chamber with a suction port of the first pumping section, and an auxiliary exhaust passage is provided to communicate an auxiliary chamber with a suction port of the second pumping section.

Vacuum exhaust system

A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.

Trap for collecting solid

A bearing lubricating structure for rotary machinery having a rotor rotatably supported by a bearing in a casing, an oil reservoir provided in a lower part of a bearing chamber accommodating the bearing, and an oil disk attached to an end of a rotating shaft of the rotor and immersed in lubricating oil in the oil reservoir so as to supply the bearing with lubricating oil splashed by the oil disk, wherein a guide groove is provided to collect lubricating oil flowing down an inner wall of a cover attached to an end of the casing; a suction nozzle is inserted into the guide groove to suck lubricating oil collected in the guide groove; a lubricant passage extends through the inside of the rotating shaft to supply the bearing with lubricating oil sucked through the suction nozzle; and an oiling nozzle is communicated with the lubricant passage and performs a pumping action induced by the rotation of the shaft, whereby a sufficiently large amount of lubricating oil is supplied to the bearing.

Bearing lubricating structure for rotary machinery

A multistage vacuum pump including a plural set of two lobe type vacuum pumps arranged on a common shaft for rotors and in a common casing. The adjacent pumps are connected in series with each other through a communicating passage formed in a pump casing. A solid material collector having a cooling device is provided in the communicating passage so that it is dismountable from the pump casing. A solid component in a compressed gas is forcibly produced by and adhered to the solid material collector. Thus, it is not necessary to disassemble the pump casing for cleaning the same.

Multistage vacuum pump with interstage solid material collector and

Growing community of inventors

Ayase, Japan

Yasuhiro Niimura