Synaptics Display Devices Gk

Nexchip Semiconductor Co., Ltd

Yasuhiro Kumagai

Masami Koketsu

Hisao Nakamura

Masatoshi Taya

Yuichi Nakagomi

Norio Nakano

The present disclosure provides a method for manufacturing semiconductor element. The method includes: a first masking process, forming a resist layer on the surface of the substrate; a channel forming process, implanting impurities with the same polarity as a well of an FET region into the surface of the substrate, and forming a channel region for the well of the FET region; a gate forming process, forming gates G respectively on the well of the FET region and the well of the variable-capacitance diode region separated by insulating films; a second masking process, generating a second implantation barrier layer on the surface of the substrate; and an epitaxy forming process, implanting impurities with the opposite polarity to that of the well of the FET region into the surface of the substrate, and forming an epitaxy region for the well of the FET region.

Method for manufacturing semiconductor element

A semiconductor wafer includes circuit integration regions each incorporating an integrated circuit and guard rings disposed to surround the circuit integration regions, respectively. A scribe region disposed between every adjacent two of the guard rings. An element and a pad electrically connected to the element are disposed in the scribe region. A groove is disposed along a corresponding guard ring on a front surface of the semiconductor wafer between the pad and the corresponding guard ring. The distance between the groove and the pad is varied along the corresponding guard ring.

Semiconductor wafer, semiconductor IC chip and manufacturing method of the same

In a display drive IC chip of an LCD or the like, an alignment mark is arranged in an alignment mark arrangement region on the main surface thereof, a dummy pattern is arranged on a lower layer, and an actual pattern is further arranged on the lower layer.

Growing community of inventors

Tokyo, Japan

Yasuhiro Kumagai